Results 111 to 120 of about 1,559 (206)
This study investigates the effects of substrate bias voltage on the properties of titanium nitride (TiN) and titanium oxynitride (TiON) thin films deposited via High-Power Impulse Magnetron Sputtering (HiPIMS).
Ferroudja Lemdani +6 more
doaj +1 more source
The demand for efficient data processing motivates a shift toward in-memory computing architectures. Ferroelectric materials, particularly AlScN, show great promise for next-generation memory devices.
Federica Messi +5 more
doaj +1 more source
High power impulse magnetron sputtering under industrial conditions
In this thesis, the recent development step of magnetron sputtering, termed high power impulse magnetron sputtering (HiPIMS) has been studied. Compared to conventional magnetron sputtering HiPIMS provides a higher plasma density which can ionise the ...
Samuelsson, Mattias
core
High power impulse magnetron sputtering (HIPIMS) : Fundamental plasma studies and material synthesis. [PDF]
Physical vapour deposition (PVD) technology is widely used for deposition of coatings with applications in various industries; coatings in semiconductor industry, optical coatings or hard coatings mostly used in car and aerospace industries. In 1999 novel physical vapour deposition technology entitled high power impulse magnetron sputtering (HIPIMS ...
openaire
High power impulse magnetron sputtering under industrial conditions [Elektronisk resurs]
In this thesis, the recent development step of magnetron sputtering, termed high power impulse magnetron sputtering (HiPIMS) has been studied. Compared to conventional magnetron sputtering HiPIMS provides a higher plasma density which can ionise the ...
Samuelsson, Mattias, +5 more
core
Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering. [PDF]
Bai H +12 more
europepmc +1 more source
We report a systematic comparison of niobium nitride thin films deposited on oxidized silicon substrates by reactive DC magnetron sputtering and reactive high-power impulse magnetron sputtering (HiPIMS).
Hugo, Collin M. +3 more
core +1 more source
Research on Plasma Characteristics of High-Power Impulse Magnetron Sputtering Ti-Nb-Cr Target and Its Effect on Film Properties. [PDF]
Chen C +5 more
europepmc +1 more source
Assessment of HIPIMS-Deposited TiN Nanostructured Thin Films as Hydrogen Permeation Barriers on Carbon Steel. [PDF]
González-Durán R +2 more
europepmc +1 more source

