Results 101 to 110 of about 1,559 (206)

Transient transport phenomena in high power impulse magnetron sputtering discharges

, 2021
High power impulse magnetron sputtering (HiPIMS) ist ein Verfahren zu Abscheidung dünner Schichten. HiPIMS Entladungen zeichnen sich durch eine Konfiguration gekreuzter elektrischer und magnetischer Felder aus.
Held, Julian (Dr. rer. nat.)
core  

Preparation and tribological properties of WS2 solid lubricating coating with dense structure using HiPIMS

Journal of Materials Research and Technology
In this study, a dense WS2 coating was deposited via high-power impulse magnetron sputtering (HiPIMS) after solving the glow discharge problem, and it was compared with WS2 coating deposited via radio frequency (RF) sputtering.
Puyou Ying, Hanying Sun, Ping Zhang, Changhong Lin, Tao Yang, Jianbo Wu, Min Huang, Tianle Wang, Zhibiao Lian, Vladimir Levchenko   +9 more
doaj   +1 more source

On the electron energy in the high power impulse magnetron sputtering discharge

, 2009
The temporal variation of the electron energy distribution function (EEDF) was measured with a Langmuir probe in a high power impulse magnetron sputtering (HiPIMS) discharge at 3 and 20 mTorr pressures.
Gudmundsson, J T, Larsson, Petter, D. Lundin, Helmersson, Ulf, J. T. Gudmundsson, Gudmundsson, J T,, Lundin, Daniel, P. Sigurjonsson, Sigurjonsson, P.,, Lundin, Daniel,, U. Helmersson, Helmersson, Ulf,, Sigurjonsson, P., Larsson, Petter,, P. Larsson   +14 more
core   +1 more source

Metallization of nanostructures by High Power Impulse Magnetron Sputtering

, 2015
In this contribution, we present the use of High Power Impulse Magnetron Sputtering (HiPIMS) for metallization of nanostructures for microelectronics. This work is motivated by meeting the increasing demands on deposition processes due to the increasing ...
Zhang, Shi-Li,, Zhang, Zhen,, Jablonka, Lukas,, Kubart, Tomas,   +3 more
core  

High Efficiency Copper Indium Gallium DiSelenide (CIGS) by High Power Impulse Magnetron Sputtering (HIPIMS): A Promising and Scalable Application in Thin-film Photovoltaics

, 2009
A novel method to deposit Copper Indium Gallium Diselenide (CIGS) using High Power Impulse Magnetron Sputtering (HIPIMS) was demonstrated and compared to the existing DC magnetron sputtering process.
Shen Jackson, Ankush Halbe, Robert Weiss, Arutiun P. Ehiasarian, Alex Welsh, Paul Johnson, Upendra Avachat   +6 more
core   +1 more source

Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide

, 2011
The effect of peak power in a high power impulse magnetron sputtering (HiPIMS) reactive deposition of TiO(2) films has been studied with respect to the deposition rate and coating properties.
Larsson, Petter, Magnusson, Roger, Aijaz, Asim,, Montri Aiempanakit, Tomáš Kubart, Jensen, Jens,, Helmersson, Ulf, Petter Larsson, Aijaz, Asim, Aiempanakit, Montri, Kubart, Tomas, Magnusson, Roger,, Ulf Helmersson, Asim Aijaz, Helmersson, Ulf,, Larsson, Petter,, Aiempanakit, Montri,, Kubart, Tomas,, Roger Magnusson, Jens Jensen, Jensen, Jens   +20 more
core   +1 more source

Superhard oxidation-resistant Ti1-xAlxBy thin films grown by hybrid HiPIMS/DCMS co-sputtering diboride targets without external substrate heating

Materials & Design
Ti1-xAlxBy films (0.40 ≤ x ≤ 0.76, and 1.81 ≤ y ≤ 2.03) combining good mechanical properties and high-temperature oxidation resistance are demonstrated.
B. Wicher, O.V. Pshyk, X. Li, B. Bakhit, V. Rogoz, I. Petrov, L. Hultman, G. Greczynski   +7 more
doaj   +1 more source

Oxygen-driven shell-like microstructure: a pathway to high-performance PVD Cr coatings for metal protection

npj Materials Degradation
Chromium (Cr) coatings, known for their corrosion resistance and luster, often suffer from coarse columnar grains when fabricated by physical vapor deposition (PVD), limiting their performance.
Meiqi Zhang, Li Wang, Zhenyu Wang, Yong Cheng, Guanshui Ma, Shiyao Tan, Peiling Ke, Aiying Wang   +7 more
doaj   +1 more source

Fabrication and Properties of Hard Coatings by a Hybrid PVD Method

Lubricants
By integrating cathodic arc evaporation (CAE) with magnetron sputtering (MS) or high-power impulse magnetron sputtering (HiPIMS), hard coatings with diverse multicomponent compositions can be fabricated.
Rui Zhang, Qimin Wang, Yuxiang Xu, Lisheng Li, Kwang Ho Kim   +4 more
doaj   +1 more source

On tailoring structural and optoelectronic properties of TiO2 thin films synthesized via ‘room’ temperature high power impulse magnetron sputtering (HiPIMS)

JPhys Energy
Titanium dioxide (TiO _2 ) is a key material in optoelectronic and energy conversion technologies, including solar cells and photocatalysis. However, integrating TiO _2 into flexible or temperature-sensitive devices requires deposition techniques that ...
Aarati Chacko, Erwin Hack, Sebastian Lohde, Robin Bucher, Oğuz Yildirim, Arnold Müller, Michel Calame, Hans J Hug, Mirjana Dimitrievska   +8 more
doaj   +1 more source