Results 191 to 200 of about 1,559 (206)

On the Deposition Rate and Ionized Flux Fraction in High Power Impulse Magnetron Sputtering (HiPIMS)

Annual Technical Conference Proceedings, 2021
openaire   +1 more source

Hybrid HIPIMS+MFMS power supply for dual magnetron sputtering systems

Vacuum, 2020
V O Oskirko, A N Zakharov, A A Solovyev
exaly  

HIPIMS – High Power Impulse Magnetron Sputtering

2013
openaire   +1 more source

Time resolved diagnostic study of High Power Impulse Magnetron Sputtering (HiPIMS) discharges

2023
openaire   +1 more source

Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator

Thin Solid Films, 2011
R Bandorf, Arutiun P Ehiasarian
exaly  

High-Power Impulse Magnetron Sputtering (HiPIMS)

2016
openaire   +1 more source

PVD: Cathodic Arc and High Power Impulse Magnetron Sputtering (HIPIMS)

2013
openaire   +1 more source

Synthesis and properties of Cr–Al–Si–N films deposited by hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and DC pulse sputtering

Transactions of Nonferrous Metals Society of China, 2012
Min Su Kang, Tie-Gang Wang, Jung Ho Shin   +2 more
exaly  

Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering

Surface and Coatings Technology, 2019
Ioana-Laura Velicu, C Porosnicu, Ilarion Mihaila   +2 more
exaly  

Effect of duty cycles on the deposition and characteristics of high power impulse magnetron sputtering deposited TiN thin films

Surface and Coatings Technology, 2014
Chi-Lung Chang, Wan-Yu Wu
exaly