Results 191 to 200 of about 18,610,504 (202)
Some of the next articles are maybe not open access.
RF substrate bias with high power impulse magnetron sputtering (HIPIMS)
2009WEICHART JUERGEN, KADLEC STANISLAV
openaire +3 more sources
Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)
2009KADLEC STANISLAV, WEICHART JURGEN
openaire +4 more sources
The high power impulse magnetron sputtering discharge as an ionized physical vapor deposition tool
Vacuum, 2010J T Gudmundsson
exaly
Control of reactive high power impulse magnetron sputtering processes
Surface and Coatings Technology, 2010exaly

