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Effect of the Degree of High Power Impulse Magnetron Sputtering (HIPIMS) Utilisation on the Corrosion Properties of TiN Films

Annual Technical Conference Proceedings, 2013
TiN coatings were deposited by conventional dc unbalanced magnetron (UBM) sputtering, combined High Power Impulse Magnetron Sputtering (HIPIMS)/UBM and pure HIPIMS sources in an industrial size 4 cathode magnetron sputtering machine with a bias of -50V during deposition.
A.A. Sugurmaran   +5 more
openaire   +1 more source

Textured Growth of AlN Films Deposited on Si(100) by DC Reactive Magnetron Sputtering and by High Power Impulse Magnetron Sputtering (HiPIMS)

2016
We have studied the texture evolution of Aluminum nitride (AlN) thin. AlN thin films were deposited on Si (100) substrate by dc magnetron sputtering (dcMS) and High Power Impulse Magnetron Sputtering (HiPIMS) technics. The growth of AlN thin films is observed to occur in two phases, stable hexagonal phase (AlN_H) and cubic phase (AIN_C).
B. Riah   +4 more
openaire   +1 more source

Novel TiAlCN/VCN nanoscale multilayer PVD coatings deposited by the combined high-power impulse magnetron sputtering/unbalanced magnetron sputtering (HIPIMS/UBM) technology

Vacuum, 2008
A new TiAlCN/VCN coating combining high hardness, low friction coefficient and chemical inertness has been developed for dry machining of "Sticky" (Al-, Ti- and Ni-based) alloys as well as advanced Metal-Matrix-Composite (MMC) materials used in aerospace and automotive industries. Excellent performance was achieved due to the synergy between V and C as
P. Eh. Hovsepian   +3 more
openaire   +1 more source

High power impulse magnetron sputtering (HiPIMS) for the fabrication of antimicrobial and transparent TiO2 thin films

Current Opinion in Chemical Engineering, 2022
Bih-Show Lou   +6 more
openaire   +1 more source

Electrical characterization of CZTS thin film prepared by high power impulse magnetron sputtering (HiPIMS) deposition

2022 IEEE 39th International Electronics Manufacturing Technology Conference (IEMT), 2022
Siti Noryasmin Jaffar   +3 more
openaire   +1 more source

ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering

Surface and Coatings Technology, 2021
Wahyu Diyatmika   +2 more
exaly  

High Power Impulse Magnetron Sputtering (HIPIMS) deposited CrN/NbN coating for tribocorrosion resistance

2021
Y P Purandare   +4 more
openaire   +1 more source

High power impulse magnetron sputtering (HiPIMS) prepared ultrathin gold film for plasmonic biosensor application

Gold Bulletin, 2023
Sheng-Yang Huang   +4 more
openaire   +1 more source

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