Design and Scalable Synthesis of Thermochromic VO2-Based Coatings for Energy-Saving Smart Windows with Exceptional Optical Performance. [PDF]
Kaufman M +4 more
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Synthesis and Characterization of Boron Nitride Thin Films Deposited by High-Power Impulse Reactive Magnetron Sputtering. [PDF]
Stankus V +4 more
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Life Cycle Assessment and Critical Raw Materials Analysis of Innovative Palladium-Substituted Membranes for Hydrogen Separation. [PDF]
Mohtashamifar A +5 more
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Synthesis and Characterization of Multilayered CrAlN/Al2O3 Tandem Coating Using HiPIMS for Solar Selective Applications at High Temperature. [PDF]
Sanchez-Perez M +7 more
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Novel Cemented Carbide Inserts for Metal Grooving Applications. [PDF]
Konstanty J, Layyous A, Furtak Ł.
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Comparative Study of Nanostructured Multilayer Cr/(Cr/a-C)ml Coatings Deposited on HS6-5-2 Steel by Magnetron Sputtering. [PDF]
Dimitrova R +9 more
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Nanoelectronics: Materials, Devices and Applications. [PDF]
Wang C.
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Applications of HIPIMS metal oxides
Thin Solid Films, 2013Abstract The high degree of ionization of the sputtered material during the coating process is one of the main features of HIPIMS (high power impulse magnetron sputtering). The use of HIPIMS leads to better film quality for hard coatings based on metal nitrides and to more conformal coatings during via fillings with high aspect ratios used in ...
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Abstract High Power Impulse Magnetron Sputtering (HiPIMS) with pre-ionization was successfully used for metal deposition at very low-pressures by feeding one cathode of a conventional dual magnetron deposition system, the other one being radio frequency (RF) supplied.
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Spoke behaviour in reactive HiPIMS
Plasma Sources Science and Technology, 2021Abstract Plasma in high-power impulse magnetron sputtering discharge, similarly to other discharges utilising E × B field (Hall thrusters, homopolar devices), undergoes self-organisation into the ionisation zones predominantly rotating
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