Results 131 to 140 of about 476 (176)
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Dynamics of HiPIMS Discharge Operated in Oxygen
IEEE Transactions on Plasma Science, 2011We report on time- and species-resolved plasma imaging analysis of high-power impulse magnetron sputtering discharge operated above a Cr target in pure oxygen. It was found that the discharge emission is dominated by oxygen species. No metal-dominated sputtering has been detected, in contrast to the discharges in Ar, N2, and N2/Ar mixtures investigated
M. Hala +3 more
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Spoke transitions in HiPIMS discharges
Plasma Sources Science and Technology, 2015Spokes, localised light emission patterns appearing during the HiPIMS discharge, are investigated using optical emission diagnostic and electrical probes. Both, temporal and spatial aspects of the spoke phenomenon have been investigated. The evolution from stochastic to self-organised patterns consisting of a finite number of spokes along the racetrack
A Hecimovic +4 more
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HiPIMS ‐ Technologie und Anwendungsfelder
Vakuum in Forschung und Praxis, 2009AbstractSeit der Einführung der planaren Magnetronkatode Mitte der siebziger Jahre hat die Magnetronzerstäubung fast alle Industriezweige, für die dünne Schichten eine Rolle spielen, im Sturm erobert. Zahlreiche Meilensteine wurden in den zurückliegenden 30 Jahren gesetzt.
Ralf Bandorf +4 more
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Triple probe mesurements in HiPIMS plasma
2016 IEEE International Conference on Plasma Science (ICOPS), 2016Triple probes are a useful diagnostic tool to measure the ion density ni and electron temperature Te in low-pressure plasmas without the necessity to obtain a probe I-V characteristic. This can give advantages over single and double Langmuir probes for the measurement of fast, non-periodic events1.
Francis Lockwood Estrin +1 more
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Characterization of electromagnetic fluctuations in a HiPIMS plasma
Plasma Sources Science and Technology, 2016A high power impulse magnetron sputtering (HiPIMS) plasma has been characterized by means of Langmuir probes measuring floating potential, electron temperature and density. Moreover, magnetic sensors have been employed in the analysis of the magnetic fluctuations.
Spagnolo S +6 more
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HIPIMS: The New PVD Technology
Vakuum in Forschung und Praxis, 2008HIPIMS (high power impulse magnetron sputtering) represents the most recent development in the field of PVD pulse sputtering technology. Utilizing extreme high pulse power densities (4-6MW) discharge conditions are created similar to the well-known cathodic arc discharge, yet completely avoiding the appearance of droplets. High metal ion concentrations
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Enhanced ionized sputtering in HIPIMS
Vakuum in Forschung und Praxis, 2013AbstractThe present paper aims to shortly review a relatively new approach to magnetron sputtering, namely “enhanced ionization sputtering” (EIS) or as it is more commonly known “High Power Pulsed Magnetron Sputtering“ (HIPIMS). The EIS concept describes a range of plasmas that have the common features of exhibiting a higher (than what is commonly ...
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2015
AlTiN is a promising anti-oxidation and corrosion protective material. Thanks to the formation of a coherent, compact and adherent alumina scale, it can be applied in harsh environments. In this work, the intrinsic properties of AlTiN films produced by reactive High Power Impulse Magnetron Sputtering (HiPIMS) have been investigated.
Deambrosis S. M. +6 more
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AlTiN is a promising anti-oxidation and corrosion protective material. Thanks to the formation of a coherent, compact and adherent alumina scale, it can be applied in harsh environments. In this work, the intrinsic properties of AlTiN films produced by reactive High Power Impulse Magnetron Sputtering (HiPIMS) have been investigated.
Deambrosis S. M. +6 more
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Fundamental surface processes in HiPIMS plasmas
2021Die Oberflächen verschiedener (Komposit-) Targets wurden nach dem Zerstäuben (Sputtern) in einer High Power Impulse Magnetron Sputtering (HiPIMS)-Entladung mittels Röntgen-Photoelektronenspektroskopie (XPS) in-vacuo charakterisiert. Dies wurde ergänzt durch optische Plasma-Charakterisierungstechniken wie optische Emissionsspektroskopie und ICCD ...
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HiPIMS of MoS2 – Current-voltage characteristics
Materials Letters, 2022Wolfgang Tillmann +6 more
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