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The work presented in this thesis involves experimental and theoretical studies related to a thin film deposition technique called high power impulse magnetron sputtering (HiPIMS), and more specifically the plasma properties and how they influence the coating. HiPIMS is an ionized physical vapor deposition technique based on conventional direct current
Lundin, Daniel
core +4 more sources
Insights into the copper HiPIMS discharge: deposition rate and ionised flux fraction
The influence of pulse length, working gas pressure, and peak discharge current density on the deposition rate and ionised flux fraction in high power impulse magnetron sputtering discharges of copper is investigated experimentally using a charge ...
J. Fischer +6 more
semanticscholar +4 more sources
A Laminating Strategy to Manyfold Enhance the Elastic Stretchability of Stretchable Electronics. [PDF]
We propose a laminating strategy that laminates a thick‐polymer layer onto the thin‐ribbon metallic structure. Using serpentine structures on soft and hard substrates as representative cases, this approach increases elastic stretchability by 3.5‐fold and 2.3‐fold.
Zhou Z +6 more
europepmc +2 more sources
Enhanced Oxygen-Reaction Electrocatalysis and Corrosion Resistance of CoCrFeNi Thin Films by Tuned Microstructure and Surface Oxidation. [PDF]
This work presents CoCrFeNi thin films, synthesized by physical vapor deposition as bifunctional oxygen electrocatalysts that are corrosion resistant in alkaline conditions. The film microstructure is tuned by ion acceleration (substrate bias) during deposition and the film's surfaces are oxidized electrochemically by anodization.
Linder C +7 more
europepmc +2 more sources
Zinc oxide thin films have been developed through thermal oxidation of Zinc thin films grown by high impulse power magnetron sputtering (HiPIMS). The influence of various sputtering power on thin film structural, morphological, photocatalytic, and ...
Endrika Widyastuti +2 more
doaj +2 more sources
AlTiN is a promising anti-oxidation and corrosion protective material. Thanks to the formation of a coherent, compact and adherent alumina scale, it can be applied in harsh environments. In this work, the intrinsic properties of AlTiN films produced by reactive High Power Impulse Magnetron Sputtering (HiPIMS) have been investigated.
Deambrosis S. M. +6 more
openaire +2 more sources
Titanium Nitride Coatings on CoCrMo and Ti6Al4V Alloys: Effects on Wear and Ion Release [PDF]
While titanium nitride (TiN) coatings are well known for their biocompatibility and excellent mechanical properties, their wear particle and debris release in orthopedic implants remains a matter of active investigation. This study addresses the efficacy
Mohammed AbuAlia +4 more
doaj +2 more sources
The Enhanced Performance of Oxide Thin-Film Transistors Fabricated by a Two-Step Deposition Pressure Process [PDF]
It is usually difficult to realize high mobility together with a low threshold voltage and good stability for amorphous oxide thin-film transistors (TFTs).
Mingjie Zhao +10 more
doaj +2 more sources
Formations of anode double layer and ion beam in bipolar-pulse HiPIMS (BP-HiPIMS)
Abstract As an emerging ion acceleration plasma source, the bipolar-pulse high power impulse magnetron sputtering (BP-HiPIMS) discharge provides an effective approach to improve deposited ion energy and tailor the film properties for a large range of applications.
Mingyue Han +8 more
+5 more sources
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS [PDF]
Many technologies require highly-oriented and textured functional thin films. The most common synthe-sis approaches use on-axis sputter geometries. However, in some scenarios, on-axis sputtering is not feasible.
J. Patidar +9 more
semanticscholar +1 more source

