Results 11 to 20 of about 2,236 (212)
A comparison between DCMS, HiPIMS and a novel ‘HiPIMS+Kick’ deposition for piezoelectric thin-films [PDF]
2019 IEEE International Ultrasonics Symposium (IUS), 2019 High power impulse magnetron sputtering (HiPIMS) has been shown to improve optical and semi-conductor thin-film coatings through increased density [1], crystallinity and more control over deposition parameters [2]. Here, HiPIMS and, a new technique, HiPIMS + ‘Kick’ are investigated in relation to deposited piezoelectric coatings and compared with a ...
Mhairi Rogan +7 more
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Industrial applications of HIPIMS
Journal of Physics: Conference Series, 2008 The development of reliable HIPIMS power supplies has reached a satisfactory level. Furthermore conventional magnetron cathodes can be used in connection with HIPIMS power supplies. Therefore HIPIMS equipped PVD coating systems can be designed with sufficient reliability.
W-D Münz +4 more
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AIP Advances, 2018 The electrical characteristics and spectroscopic properties have been comprehensively investigated in a DC superimposed high power impulse magnetron sputtering (DC-HiPIMS) deposition system in this paper.
Xiao Zuo +4 more
doaj +3 more sources
Hybrid AdvancesAlCrN and AlCrVYN thin films were deposited by physical vapor deposition using dcMS, HiPIMS and hybrid dcMS/HiPIMS processes. Although all the thin films were produced using the same time-average power and show only slight differences in the chemical ...
Wolfgang Tillmann +5 more
doaj +2 more sources
, 2010 The work presented in this thesis involves experimental and theoretical studies related to a thin film deposition technique called high power impulse magnetron sputtering (HiPIMS), and more specifically the plasma properties and how they influence the coating. HiPIMS is an ionized physical vapor deposition technique based on conventional direct current
Lundin, Daniel
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Fundamental surface processes in HiPIMS plasmas
, 2021 Die Oberflächen verschiedener (Komposit-) Targets wurden nach dem Zerstäuben (Sputtern) in einer High Power Impulse Magnetron Sputtering (HiPIMS)-Entladung mittels Röntgen-Photoelektronenspektroskopie (XPS) in-vacuo charakterisiert. Dies wurde ergänzt durch optische Plasma-Charakterisierungstechniken wie optische Emissionsspektroskopie und ICCD ...
Layes, Vincent (M. Sc.)
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AIP Advances, 2021 The thrusts induced by the 45-mm-diameter DC and high power impulse magnetron sputtering [DC magnetron sputtering (DCMS) and high power impulse magnetron sputtering (HiPIMS)] sources are assessed by using the pendulum thrust balance, where the ...
Kazunori Takahashi, Hidemasa Miura
doaj +1 more source
, 2022 S.1The International Conference on Fundamentals and Applications of HIPIMS is a well-established forum on the latest academic and industrial results in the field of high power impulse magnetron sputtering.
Bandorf, R.
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A Laminating Strategy to Manyfold Enhance the Elastic Stretchability of Stretchable Electronics. [PDF]
Adv Sci (Weinh)We propose a laminating strategy that laminates a thick‐polymer layer onto the thin‐ribbon metallic structure. Using serpentine structures on soft and hard substrates as representative cases, this approach increases elastic stretchability by 3.5‐fold and 2.3‐fold.
Zhou Z +6 more
europepmc +2 more sources
, 2022 S.14-20Recently, compact uniform and adhesive films of Ag and Cu have been prepared by DC-magnetron sputtering (DC), pulsed DC magnetron sputtering (DCP) and high power impulse magnetron sputtering (HIPIMS).
Pulgarin, C. +5 more
core +1 more source