Low temperature deposition of functional thin films on insulating substrates enabled by selective ion acceleration using synchronized floating potential HiPIMS [PDF]
Nature CommunicationsIonized physical vapor deposition techniques, such as high-power impulse magnetron sputtering (HiPIMS), are gaining popularity but face challenges for deposition on insulating materials, where applying negative potentials for ion acceleration is ...
Jyotish Patidar +4 more
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Hybrid Advances, 2023 AlCrN and AlCrVYN thin films were deposited by physical vapor deposition using dcMS, HiPIMS and hybrid dcMS/HiPIMS processes. Although all the thin films were produced using the same time-average power and show only slight differences in the chemical ...
Wolfgang Tillmann +5 more
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Band-gap engineering of zirconia by nitrogen doping in reactive HiPIMS: a step forward in developing innovative technologies for photocatalysts synthesis [PDF]
Frontiers in Chemistry, 2023 In the global context of climate change and carbon neutrality, this work proposes a strategy to improve the light absorption of photocatalytic water-splitting materials into the visible spectrum by anion doping.
Teodora Matei +7 more
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Industrial applications of HIPIMS
Journal of Physics: Conference Series, 2008 The development of reliable HIPIMS power supplies has reached a satisfactory level. Furthermore conventional magnetron cathodes can be used in connection with HIPIMS power supplies. Therefore HIPIMS equipped PVD coating systems can be designed with sufficient reliability.
W-D Münz +4 more
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A comparison between DCMS, HiPIMS and a novel ‘HiPIMS+Kick’ deposition for piezoelectric thin-films [PDF]
2019 IEEE International Ultrasonics Symposium (IUS), 2019 High power impulse magnetron sputtering (HiPIMS) has been shown to improve optical and semi-conductor thin-film coatings through increased density [1], crystallinity and more control over deposition parameters [2]. Here, HiPIMS and, a new technique, HiPIMS + ‘Kick’ are investigated in relation to deposited piezoelectric coatings and compared with a ...
Mhairi Rogan +7 more
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AIP Advances, 2018 The electrical characteristics and spectroscopic properties have been comprehensively investigated in a DC superimposed high power impulse magnetron sputtering (DC-HiPIMS) deposition system in this paper.
Xiao Zuo +4 more
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HiPIMS co-sputtering for the increase of the mechanical properties of arc deposited TiN coatings
Journal of Materials Research and Technology, 2023 Relatively few studies have addressed the use of vacuum arc evaporation (VAE) in conjunction with high-power impulse magnetron sputtering (HiPIMS), due to differences in the respective pressure requirements.
Chi-Lung Chang +4 more
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Influence of HiPIMS Pulse Widths on the Structure and Properties of Copper Films [PDF]
Materials (Basel)High-power pulse magnetron sputtering is a new type of magnetron sputtering technology that has advantages such as high peak power density and a high ionization rate compared to DC magnetron sputtering.
Xincheng Liu +4 more
semanticscholar +2 more sources
Effects of HiPIMS Duty Cycle on Plasma Discharge and the Properties of Cu Film [PDF]
Materials (Basel)In this paper, Cu thin films were deposited on Si (100) substrates by the high−power impulse magnetron sputtering (HiIPMS) technique, and the effects of different duty cycles (from 2.25% to 5.25%) on the plasma discharge characteristics, microstructure ...
Yongjie Ren +4 more
semanticscholar +2 more sources
Highly Stable and Enhanced Performance of p–i–n Perovskite Solar Cells via Cuprous Oxide Hole-Transport Layers [PDF]
Nanomaterials, 2023 Solar light is a renewable source of energy that can be used and transformed into electricity using clean energy technology. In this study, we used direct current magnetron sputtering (DCMS) to sputter p-type cuprous oxide (Cu2O) films with different ...
Tung-Han Chuang +6 more
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