Results 151 to 160 of about 1,630 (175)

Sub-10nm resolution after lift-off using HSQ/PMMA double layer resist

Microelectronic Engineering, 2013
Valentina Bonanni, Alexandre Dmitriev, Marcus Rommel   +2 more
exaly  

HSQ

2011
openaire   +1 more source

HSQ – Health Status Questionnaire

2014
openaire   +1 more source

Repairing plasma-damaged low-k HSQ films with trimethylchlorosilane treatment

Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2006
R O Dusane
exaly  

Improving the adhesion of hydrogen silsesquioxane (HSQ) onto various substrates for electron-beam lithography by surface chemical modification

Microelectronic Engineering, 2014
Zhiqiang Zhang, Haiwen Li, Yuguo Tang
exaly  

Investigation of the low dielectric siloxane-based hydrogen silsesquioxane (HSQ) as passivation layer on TFT-LCD

Thin Solid Films, 2007
Po-Tsun Liu
exaly  

Ultra-dense hydrogen silsesquioxane (HSQ) structures on thin silicon nitride membranes

Microelectronic Engineering, 2009
Sookyung Choi
exaly  

20nm Line/space patterns in HSQ fabricated by EUV interference lithography

Microelectronic Engineering, 2007
Celestino Padeste, Mark Stoykovich, Yasin Ekinci   +2 more
exaly  

Supercritical drying process for high aspect-ratio HSQ nano-structures

Microelectronic Engineering, 2006
Jens Bolten, T Wahlbrink, M C Lemme
exaly  

Hydrogen Silsesquioxane (HSQ) Etching Resistance Dependence on Substrate During Dry Etching

Physica Status Solidi (A) Applications and Materials Science, 2019
Peng Cui, Yuping Zeng, Guangyang Lin
exaly