Results 161 to 170 of about 1,630 (175)

Supercritical drying for high aspect-ratio HSQ nano-structures

Microelectronic Engineering, 2007
Jens Bolten, T Wahlbrink, M C Lemme
exaly  

Влияние температуры проявления на контраст электронного резиста HSQ

Микроэлектроника, 2020
openaire   +1 more source

High resolution HSQ nanopillar arrays with low energy electron beam lithography

Microelectronic Engineering, 2013
Guilhem Larrieu, F Carcenac
exaly  

Electron beam lithography of HSQ/PMMA bilayer resists for negative tone lift-off process

Microelectronic Engineering, 2008
exaly  

Realization of sub-micron patterns on GaAs using a HSQ etching mask

Microelectronic Engineering, 2005
Jean-Pierre Vilcot
exaly  

Three dimensional HSQ structures formed using multiple low energy electron beam lithography

Microelectronic Engineering, 2006
Richard Blaikie
exaly  

HSQ baking for reduced dielectric constant

1999
NGO MINH V, TRAN KHANH Q, KITSON TERRI J, YOU LU, CHAN SIMON S, YANG JEAN Y   +5 more
openaire   +1 more source

METHOD OF FORMING HSQ LAYERS AND BORDERLESS VIAS WITH HSQ GAP FILLED PATTERNED METAL LAYERS

2010
CHEN ROBERT C, SHIELDS JEFFREY A, DAWSON ROBERT, TRAN KHANH   +3 more
openaire   +1 more source

HSQ processing for reduced dielectric constant

1999
NGO MINH V, TRAN KHANH Q, YOU LU, YANG JEAN Y, HUANG RICHARD J   +4 more
openaire   +1 more source

Potential of Cat-CVD deposited a-SiC:H as diffusion barrier layer on low-k HSQ films for ULSI

Thin Solid Films, 2006
exaly