Results 131 to 140 of about 3,728 (141)

Machine learning based inverse lithography technology for an advanced DRAM contact layer

DTCO and Computational Patterning II, 2023
Moongyu Jeong, Hyunchul Kim, Kyle Braam, Munhoe Do, Kangjin Kim, Jongcheon Park, Chunsoo Kang, Chanha Park, Thomas Cecil   +8 more
openaire   +1 more source

Full chip inverse lithography technology mask synthesis for advanced memory manufacturing

DTCO and Computational Patterning II, 2023
Jennefir L. Digaum, Gary Chiang, Lin Wang, Kyle Braam, Dave Gerold, Yongdong Wang, Thuc Dam   +6 more
openaire   +1 more source

Quantitative study of local MEEF of 2D mask corrected by inverse lithography technology

Photomask Technology 2023, 2023
Futian Wang, Song Sun, Chunlong Yu, Yu Mu, Juan Wei, Xiaonan Liu, Cuixiang Wang, Liang Li, Qingchen Cao, Miao Jiang, Peng Xu, Joshua Jeong, Yilei Zeng, Andy Lan, Jiangliu Shi   +14 more
openaire   +1 more source

Application of source mask optimization in inverse lithography technology for multiple patterns

Proceedings of SPIE, 2009
Hyo-chan Kim, Sung-gon Jung, Sung-Soo Suh, Young-Chang Kim, Sung-Woo Lee, Suk-Joo Lee, Seong-Woon Choi, Chan-Hoon Park, Joo-Tae Moon   +8 more
openaire   +1 more source

Double-dipole mask-synthesis using inverse lithography technology

Microelectronic Engineering, 2010
Min-Chun Tsai
exaly  

E-beam writing time improvement for inverse lithography technology mask for full-chip

Proceedings of SPIE, 2010
Guangming Xiao, Tom Cecil, Ki-Ho Baik
exaly  

Mask synthesis for 65nm SRAM manufacturing using gradient-based Inverse Lithography Technology (ILT)

2008
Min-Chun Tsai
exaly  

BBDM-ILT: Brownian bridge diffusion model for inverse lithography technology

Journal of Micro/Nanopatterning, Materials, and Metrology
Haoxiang Jiang, Junqi Yang, Rui Xu, Ming Fang, Dean Liu   +4 more
openaire   +1 more source

An efficient inverse lithography technology method based on detail-enhanced Pix2Pix network

Third International Conference on Advanced Manufacturing Technology and Electronic Information (AMTEI 2023)
Zuoxian Chen, Zheng Shi
openaire   +1 more source

Mastering inverse lithography technology: GPU acceleration, generative AI and reinforcement learning

DTCO and Computational Patterning V
Haoyu Yang, Haoxing Ren
openaire   +1 more source