Results 141 to 150 of about 168 (150)

Quantitative study of local MEEF of 2D mask corrected by inverse lithography technology

2023
Liang Li, Jiangliu Shi, Andy Lan
exaly  

Robust level-set-based inverse lithography

Optics Express, 2011
Lam Eym, Yijiang Shen, Ningning Jia
exaly  

GMUNet-ILT: A lightweight MLP-based network for Inverse Lithography Technology

2025 International Symposium of Electronics Design Automation (ISEDA)
Ke Wang, Kun Ren, Zebang Lin, Dawei Gao, Yongyu Wu, Shibin Xu   +5 more
openaire   +1 more source

BBDM-ILT: Brownian bridge diffusion model for inverse lithography technology

Journal of Micro/Nanopatterning, Materials, and Metrology
Haoxiang Jiang, Junqi Yang, Rui Xu, Ming Fang, Dean Liu   +4 more
openaire   +1 more source

Unified inverse lithography technology (ILT) and fracturing through recurrent neural network

DTCO and Computational Patterning IV
Shilong Zhang, Youngsoo Shin
openaire   +1 more source

Inverse lithography technology (ILT): a natural solution for model-based SRAF at 45nm and 32nm

2007
Linyong Pang
exaly  

An efficient inverse lithography technology method based on detail-enhanced Pix2Pix network

Third International Conference on Advanced Manufacturing Technology and Electronic Information (AMTEI 2023)
Zuoxian Chen, Zheng Shi
openaire   +1 more source

Mastering inverse lithography technology: GPU acceleration, generative AI and reinforcement learning

DTCO and Computational Patterning V
Haoyu Yang, Haoxing Ren
openaire   +1 more source

MACHINE LEARNING FOR MASK OPTIMIZATION IN INVERSE LITHOGRAPHY TECHNOLOGIES

YANG HAOYU, REN HAOXING
openaire   +1 more source

Method and apparatus for designing an integrated circuit using inverse lithography technology

2013
LUCAS KEVIN DEAN, BOONE ROBERT ELLIOTT, RODY YVES   +2 more
openaire   +1 more source