Results 11 to 20 of about 299,640 (375)
Advanced Functional Materials, 2023 The rapid development of additive manufacturing has fueled a revolution in various research fields and industrial applications. Among the myriad of advanced 3D printing techniques, two‐photon polymerization lithography (TPL) uniquely offers a significant
Hao Wang +16 more
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Evolution in Lithography Techniques: Microlithography to Nanolithography
Nanomaterials, 2022 In this era, electronic devices such as mobile phones, computers, laptops, sensors, and many more have become a necessity in healthcare, for a pleasant lifestyle, and for carrying out tasks quickly and easily.
Ekta Sharma +6 more
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Nature Communications, 2014 The rapid miniaturization of devices and machines has fuelled the evolution of advanced fabrication techniques. However, the complexity and high cost of the state-of-the-art high-resolution lithographic systems are prompting unconventional routes for nanoscale patterning. Inspired by natural nanomachines, synthetic nanomotors have recently demonstrated
Li, Jinxing +5 more
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Inverse lithography technology: 30 years from concept to practical, full-chip reality
Journal of Micro/Nanopatterning, Materials, and Metrology, 2021 . In lithography, optical proximity and process bias/effects need to be corrected to achieve the best wafer print. Efforts to correct for these effects started with a simple bias, adding a hammer head in line-ends to prevent line-end shortening.
L. Pang
semanticscholar +1 more source
Rolling Nanoelectrode Lithography [PDF]
Micromachines, 2020 Non-uniformity and low throughput issues severely limit the application of nanoelectrode lithography for large area nanopatterning. This paper proposes, for the first time, a new rolling nanoelectrode lithography approach to overcome these challenges. A test-bed was developed to realize uniform pressure distribution over the whole contact area between ...
Hasan, Rashed Md. Murad +2 more
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Photocatalytic Lithography [PDF]
Applied Sciences, 2019 Patterning, the controlled formation of ordered surface features with different physico-chemical properties, is a cornerstone of contemporary micro- and nanofabrication. In this context, lithographic approaches owe their wide success to their versatility and their relative ease of implementation and scalability.
Guido Panzarasa, Guido Soliveri
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Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks
Nature Materials, 2020 Metal–organic frameworks (MOFs) offer disruptive potential in micro- and optoelectronics because of the unique properties of these microporous materials. Nanoscale patterning is a fundamental step in the implementation of MOFs in miniaturized solid-state
M. Tu +16 more
semanticscholar +1 more source
Journal of Microelectronic Manufacturing, 2019 As the process comes into 28nm node and below, lithography struggles stronger between high resolution (high NA) and enough process window especially for hole layers (Contacts and Vias). Taking more care of process window may result in lower image quality
Qingchen Cao +3 more
doaj +1 more source
IEEE Access, 2023 Interdigitated capacitive (IDC) sensors have been extensively researched for human-machine interfaces (HMIs) due to consistent response and easy manufacturing.
Muhammad Qasim Mehmood +7 more
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On the Relationship between Resolution Enhancement and Multiphoton Absorption Rate in Quantum Lithography [PDF]
, 2007 The proposal of quantum lithography [Boto et al., Phys. Rev. Lett. 85, 2733 (2000)] is studied via a rigorous formalism. It is shown that, contrary to Boto et al.'s heuristic claim, the multiphoton absorption rate of a ``NOON'' quantum state is actually ...
A. Leon-Garcia +6 more
core +2 more sources