Results 11 to 20 of about 223,528 (342)
, 2019 Optical lithography is a photon-based technique comprised of projecting an image into a photosensitive emulsion (photoresist) coated onto a substrate such as a silicon wafer. It is the most widely used lithography process in the high volume manufacturing
Antonsen +39 more
core +3 more sources
Science, 2008 We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a “direct write” manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing.
Giam, Louise R. +5 more
openaire +4 more sources
Frontiers in Bioengineering and Biotechnology, 2023 Micro- and nano-plastics (MNPs) are global contaminants of growing concern to the ecosystem and human health. In-the-field detection and identification of environmental micro- and nano-plastics (e-MNPs) is critical for monitoring the spread and effects ...
Sihai Luo +2 more
doaj +1 more source
Innovative design of a transmission mechanism for variable speed wind turbines
Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2015 An innovative transmission mechanism, referred to here as an independently controllable transmission (ICT), for application in variable speed wind turbines is described.
Guan-Shyong HWANG, Chung-Chi LIN
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Temperature Fluctuation Attenuation of Circulating Cooling Water Using Dynamic Thermal Filtering
Applied Sciences, 2020 The Demand for circulating cooling water (CCW) with high temperature stability and a quick response to temperature control is essential for precision engineering, so a dynamic thermal filtering method is proposed in this paper.
Yesheng Lu +4 more
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On the Relationship between Resolution Enhancement and Multiphoton Absorption Rate in Quantum Lithography [PDF]
, 2007 The proposal of quantum lithography [Boto et al., Phys. Rev. Lett. 85, 2733 (2000)] is studied via a rigorous formalism. It is shown that, contrary to Boto et al.'s heuristic claim, the multiphoton absorption rate of a ``NOON'' quantum state is actually ...
A. Leon-Garcia +6 more
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Graphene nanoribbons with zigzag and armchair edges prepared by scanning tunneling microscope lithography on gold substrates [PDF]
, 2014 The properties of graphene nanoribbons are dependent on both the nanoribbon width and the crystallographic orientation of the edges. Scanning tunneling microscope lithography is a method which is able to create graphene nanoribbons with well defined edge
Biró +48 more
core +1 more source
Large-area metasurface on CMOS-compatible fabrication platform: driving flat optics from lab to fab
Nanophotonics, 2020 A metasurface is a layer of subwavelength-scale nanostructures that can be used to design functional devices in ultrathin form. Various metasurface-based optical devices – coined as flat optics devices – have been realized with distinction performances ...
Li Nanxi +7 more
doaj +1 more source
Journal of Microelectronic Manufacturing, 2019 As the process comes into 28nm node and below, lithography struggles stronger between high resolution (high NA) and enough process window especially for hole layers (Contacts and Vias). Taking more care of process window may result in lower image quality
Qingchen Cao +3 more
doaj +1 more source
Characterisation of slow light in a waveguide grating [PDF]
, 2006 A grating was defined in a silicon nitride waveguide, using a combination of both conventional lithography and laser interference lithography. The structure was optically characterized in the 1520 – 1560 nm wavelength range by combining transmission ...
Hoekstra, Hugo J.W.M. +2 more
core +4 more sources