Development of lead-free thin-film dielectrics for capacitor applications [PDF]
This PhD project aims to develop lead-free thin-film dielectric materials for fixed value, voltage tunable and high-k zipping variable capacitors using growth techniques that can be scaled for silicon batch fabrication.
Darbyshire, David Anthony
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The production and characterisation of inorganic combinatorial libraries [PDF]
With the increasing demand for research into new materials, techniques which are able to produce and characterise a large number of samples rapidly are becoming indispensable.
Karimi, O.
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Preparation and characterization of the defect–conductivity relationship of Ga-doped ZnO thin films deposited by nonreactive radio-frequency–magnetron sputtering [PDF]
Ga-doped ZnO (ZnO:Ga) thin films were prepared by radio-frequency–magnetron sputtering on conventional glass substrates at room temperature. The structural, electrical, and optical properties of these films as a function of argon pressure and film ...
Pasquet, Isabelle +11 more
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Magnetron sputtering. Milestones of 30 years
S.1354-1359Since the introduction of the planar magnetron by J.S. Chapin in 1974 magnetron sputtering has become the most important technology for the deposition of thin films.
Szyszka, B. +3 more
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Development of innovative coatings for sun protection glasses based on the theory of the optimal spectral transmittance [PDF]
In this work new coatings for sun protection glasses for windows and glass facades were developed. These coatings improve the reduction of the energy input by solar radiation in comparison to the best sun protection glasses on the market. They reduce the
Mack, Iris
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Structure and optical properties of porous SiC film grown by magnetron sputtering on porous anodic aluminium oxide template [PDF]
Porous fluorescent SiC films were deposited by magnetron sputtering (MS) using porous anodic aluminium oxide (AAO) template. In the first step AAO was carefully placed on the Si substrate and then coated with SiC film using magnetron sputtering at the ...
He Zhenhua +3 more
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Compared to Performance of Ni / SiO2 Optical Attenuator by Two Preparing Methods
In this paper, the preparation of Ni / SiO2 optical attenuator using two kinds of process, were discussed for electroless plating and magnetron sputtering technology, by analyzing Ni film appearance , surface morphology, film composition, SiO2 substrate ...
Dong Pengzhan +3 more
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Structure characterization and tribological study of magnetron sputtered nanocomposite nc-TiAlV(N, C)/a-C coatings [PDF]
Grown by reactive unbalanced magnetron sputtering in a mixed N2 and CH4 gaseous medium, heterogeneous nanocomposite coatings in the Ti-Al-V-N-C system show extraordinarily excellent tribological performance of coated machining tools.
Chen, Linghao +11 more
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Pulse Magnetron Sputtering with high power density-an attempt at a critical evaluation
Art. 012007In this paper specific advantages and disadvantages of different pulse magnetron sputtering processes (unipolar, bipolar and HIPIMS) as well as current and potential fields of application will be discussed.
Klostermann, H. +5 more
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Most of the molybdenum (Mo) bilayer films are deposited by direct current (DC) magnetron sputtering at the bottom and the top layer (DC/DC). However, the deposition of Mo bilayer film by radio frequency (RF) Mo bottom layer and DC Mo top layer magnetron ...
Haili Zhao, Jingpei Xie, Aixia Mao
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