Results 111 to 120 of about 11,414 (169)
MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control. [PDF]
Micromachines (Basel), 2019 Cui M, Huang Y, Wang W, Cao H.
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Random Error Analysis of MEMS Gyroscope Based on an Improved DAVAR Algorithm. [PDF]
Micromachines (Basel), 2018 Song J, Shi Z, Wang L, Wang H.
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Fault Detection and Isolation of MEMS IMU Array Based on WOA-MVMD-GLT. [PDF]
Micromachines (Basel)Li H, Sun F, Tian J, He X, Zhu T.
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Surface acoustic wave MEMS gyroscope
Wave Motion, 2002zbMATH Open Web Interface contents unavailable due to conflicting licenses.
Jose, K. A. +4 more
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Microprocessing of MEMS gyroscopes
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus), 2018Application of laser radiation for materials microprocessing is widely used in various fields of science and technology today. The paper discusses the possibility of balancing the elements of MEMS gyroscope by using exposure for laser radiation. As a result of studying the parameters of the laser modification of silicon.
Lyudmila I. Dolgovykh +1 more
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2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC), 2016
This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud +3 more
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This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency ...
Ashraf Mahmoud +3 more
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Modeling a Novel MEMS Gyroscope
ECS Meeting Abstracts, 2012Abstract not Available.
Nilgoon Zarei +2 more
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A Parametrically Amplified MEMS Gyroscope
Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT), 2010The applicability of parametric amplification of either the primary and secondary vibration modes of a MEMS gyroscope, shown in Fig.1 is investigated experimentally in this paper. All control schemes have been implemented digitally onto a SHARC DSP development board.
Barry J. Gallacher +3 more
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MEMS-based hemispherical resonator gyroscopes
2012 IEEE Sensors, 2012This paper introduces a fabrication technique that uses planar MEMS micromachining processes to produce hemispherical resonating shells for gyroscopes. The hemispheres exhibit a quality factor in excess of 20,000 with resonant frequencies in the range of 20 kHz for the 4-node wineglass mode.
P. Pai +3 more
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