Results 191 to 200 of about 2,391 (245)
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Automated design of a MEMS resonator
2007 IEEE Congress on Evolutionary Computation, 2007As the application and complexity of microelectromechanical (MEMS) devices increases, there is a corresponding need for automated design and optimization tools to augment engineers' design skills. Evolutionary computation provides a set of tools that may prove very effective in this application domain.
Jason D. Lohn +2 more
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MEMS Resonators: Numerical Modeling
2020The thermal stability of the natural frequency of a double-ended tuning-fork MicroElectroMechanical Systems (MEMS) resonator is studied for different orientations of the structure on the silicon wafer and for several doping levels of the single-crystal silicon.
Zega V. +3 more
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On the testing of MEMS resonators
2009 4th International Design and Test Workshop (IDT), 2009This paper discusses the issues related to testing MEMS resonators, and suggests ways to mitigate the associated difficulties. Vacuum test conditions and their effect on the quality factor of a resonator are discussed. A custom-built vacuum system is described to simplify testing, and to avoid packaging at early stages of device characterization ...
S. Mahdavi +3 more
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Frequency Estimation for Resonant MEMS Sensors
2020 IEEE International Symposium on Circuits and Systems (ISCAS), 2020Resonant MEMS sensors have potential of providing highly precise measurements. The accurate processing of the output relies on precise frequency estimation techniques especially in the context of portable sensors for particulate matter. This paper investigates five commonly used single-tone frequency estimation techniques (3-point DFT interpolation ...
Ajay Kumar Singh +4 more
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The Journal of the Acoustical Society of America, 2009
One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC ...
Paul Merritt Hagelin +1 more
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One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC ...
Paul Merritt Hagelin +1 more
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Resonance Tracking of Nonlinear MEMS Resonators
IEEE/ASME Transactions on Mechatronics, 2012In this paper, the frequency control loop performance of nonlinear microelectromechanical resonators is investigated. A phase-locked loop (PLL) controller is used to track the resonance frequency of a nonlinear resonator and to compensate for the changes in the natural frequency.
Hossein Sohanian-Haghighi +1 more
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Modeling of RF- MEMS BAW Resonator
2010 23rd International Conference on VLSI Design, 2010Due to the demand of smaller and more portable devices the applications of MEMS resonators are rapidly increasing. Solidly Mounted Resonators (SMR) based on Bulk Acoustic Wave (BAW) technology follow MEMS principles to build high performance microwave filters for RF communication. In this paper we will provide the architecture of SMRs by discussing the
Ambarish Roy +2 more
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Packaging influences on the reliability of MEMS resonators
Microelectronics Reliability, 2008In this paper, the effect of assembly processes on the reliability of MEMS resonators is investigated. The common functions of MEMS resonators in the current technology are described as well as the most common designs. Virtual prototyping of a resonator during several assembly steps is used to estimate their influence. Experiments are executed in order
Jeroen J. M. Zaal +5 more
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Modelling MEMS Resonators Past Pull-In
Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B, 2008In this paper, we develop a mathematical model of an electrostatic MEMS beam undergoing impact with a stationary electrode subsequent to pull-in. We model the contact between the beam and the substrate using a nonlinear foundation of springs and dampers.
Chandrika P. Vyasarayani +3 more
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