Results 211 to 220 of about 2,391 (245)

Quartz resonator for MEMS oscillator

2014 European Frequency and Time Forum (EFTF), 2014
A three-dimensional length-extension mode (3D-LEM) resonator has been developed for fundamental physics purpose showing a very good frequency stability potential highlighted by a Quality factor Frequency product (Q.F) above 1013. Those characteristics are quite interesting for time & frequency applications but since a 3D structure is difficult to ...
Beatrice Bourgeteau, Raphael Levy, Denis Janiaud, Pierre Lavenus, Olivier Le Traon, Sebastien Grousset, Thomas Signamarcheix, Lamine Benaissa   +7 more
openaire   +1 more source

Damping effects in MEMS resonators

CAS 2012 (International Semiconductor Conference), 2012
Damping effects are very important in MEMS-based sensors and actuators. In this paper we use analytical models and finite element (FE) computations to quantify the energy losses due to viscous fluid damping, acoustic radiation and thermo-elastic damping.
M. Gologanu, C. G. Bostan, V. Avramescu, O. Buiu   +3 more
openaire   +1 more source

MEMS resonator with digitally tunable resonant frequency

SPIE Proceedings, 2009
This paper proposes, for the first time, a MEMS-based digitally tunable micromechanical resonator (DTMR). A general methodology of tuning the resonant frequency of a MEMS comb-driven resonator using digital voltages is presented. In this mechanism, a microelectromechanical digital-to-analog converter (MEMDAC) is employed as the tuning unit.
openaire   +1 more source

Vacuum-cavity MEMS resonator

The Journal of the Acoustical Society of America, 2006
A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure.
openaire   +1 more source

On the role of interface dissipation in MEMS resonators

2012
We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of ...
FRANGI, ATTILIO ALBERTO, CREMONESI, MASSIMILIANO, Jaakkola A., Pensala T.   +3 more
openaire   +2 more sources

Microfabricated Aluminum Nitride MEMS Resonator

2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2023
Yuxin Zhang, Tianren Feng, Hui Chen, Yangyang Chai, Yuxuan Wu, Quan Yuan   +5 more
openaire   +1 more source

Modal characteristics of coupled MEMS resonator array under the effect of residual stress

Sensors and Actuators A: Physical, 2022
Bo Peng, Xiao-Yong Fang, Xiu-Yuan Li
exaly  

MEMS RESONATORS

The Journal of the Acoustical Society of America, 2012
openaire   +1 more source

Phase feedback in MEMS resonators

2007
abstract only.
Mestrom, R.M.C., Fey, R.H.B., Nijmeijer, H.   +2 more
openaire   +1 more source

Nonparametric Identification of a Nonlinear MEMS Resonator

NODYCON conference proceedings series, 2022
Rodrigo T Rocha, Feras K Alfosail, Wen Zhao   +2 more
exaly