Results 221 to 230 of about 2,391 (245)

MEMS biaxial resonant accelerometer

2011
A microelectromechanical detection structure for a MEMS resonant biaxial accelerometer is provided with: an inertial mass, anchored to a substrate by means of elastic elements in such a way as to be suspended above the substrate, the elastic elements enabling inertial movements of detection of the inertial mass along a first axis of detection and a ...
COMI, CLAUDIA, CORIGLIANO, ALBERTO, B. Simoni   +2 more
openaire   +1 more source

MEMS Resonator Filters

2020
openaire   +1 more source

Simulations and experiments of hardening and softening resonances in a clamped–clamped beam MEMS resonator

Sensors and Actuators A: Physical, 2010
Rob Mestrom, Rob H B Fey, Henk Nijmeijer   +2 more
exaly  

Polycrystalline diamond MEMS resonator technology for sensor applications

Diamond and Related Materials, 2006
J P Sullivan
exaly  

The Effect of Microstructure on AlN MEMS Resonator Response

Integrated Ferroelectrics, 2003
A E Wickenden, R D Vispute
exaly  

0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)

Microsystems and Nanoengineering, 2018
Qingsong Li, Dingbang Xiao, Ｘin Zhou   +2 more
exaly  

Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator

Microelectronics Reliability, 2016
Mohammad Tariq Jan, Nor Hisham B Hamid, Muhammad Shoaib   +2 more
exaly  

Effects of a bottom electrode on feed-through capacitance and electrical transmission of an MEMS resonator

Microelectronic Engineering, 2012
J -M Kim, Heung-Woo Park
exaly  

Study of a 10 MHz MEMS oscillator with a TPoS resonator

Sensors and Actuators A: Physical, 2017
Xinyi Li, Yulin Huang, Yijia Du
exaly  

Optical MEMS accelerometer sensor relying on a micro‐ring resonator and an elliptical disk

IET Circuits, Devices and Systems, 2019
Ali Kazemi Nasaban Shotorban, Kian Jafari, Kambiz Abedi   +2 more
exaly