Results 201 to 210 of about 2,391 (245)
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Piezoelectric MEMS Resonators: A Review
IEEE Sensors Journal, 2021Since two decades piezoelectric MEMS resonator research has been making a headway by leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and system design, monolithic integration, packaging, material engineering, etc.
Gayathri Pillai, Sheng-Shian Li
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2015
Resonant microelectromechanical systems (MEMS) are characterized by sub-millimeter-sized components that are able to oscillate. Depending on the actuation method, these resonant MEMS are implemented, e.g., as electrostatic, electrothermal, magnetostatic or piezoelectric devices.
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Resonant microelectromechanical systems (MEMS) are characterized by sub-millimeter-sized components that are able to oscillate. Depending on the actuation method, these resonant MEMS are implemented, e.g., as electrostatic, electrothermal, magnetostatic or piezoelectric devices.
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IEE Seminar and Exhibition on MEMS Sensor Technologies, 2005
A mechanical magnetometer fabricated using deep dry etched SOI was presented. It utilises the Lorenz force generated by a current passing through a magnetic field to actuate a MEMS structure. Operating at the resonant frequency of the MEMS structure, Q amplification is used to pick off small magnetic fields.
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A mechanical magnetometer fabricated using deep dry etched SOI was presented. It utilises the Lorenz force generated by a current passing through a magnetic field to actuate a MEMS structure. Operating at the resonant frequency of the MEMS structure, Q amplification is used to pick off small magnetic fields.
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Simultaneous Resonances of Electrostatically Actuated MEMS Resonators
Volume 8: 26th Conference on Mechanical Vibration and Noise, 2014This paper deals with simultaneous resonance of MEMS cantilever resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The two frequencies of actuation are one near natural frequency, and the other near half natural frequency.
Dumitru I. Caruntu, Christian Reyes
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Measurement uncertainties in resonant characteristics of MEMS resonators
Journal of Mechanical Science and Technology, 2013This paper reports measurement of random uncertainties in resonant characteristics (resonance frequency and quality factor) of microelectromechanical system (MEMS) resonators. We employ different methods to extract resonant characteristics of 4 different MEMS resonators which are either clamped-free or clamped-clamped beams.
Il Lee, Jungchul Lee
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Voltage Elevator using a MEMS Resonator
2007 IEEE International Symposium on Circuits and Systems (ISCAS), 2007This paper proposes a new approach to realize a voltage elevator using a single MEMS capacitor with movable plates. This device works in resonant mode, and this feature allows for the use of low input voltage. Complete electrical and mechanical equivalent SIMULINK models have been designed.
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Parametric Resonance of MEMS Circular Plate Resonators
Volume 8: 27th Conference on Mechanical Vibration and Noise, 2015This paper investigates parametric resonance of electrostatically actuated MEMS circular plates for resonator sensing applications. The system consists of a clamped circular elastic plate over a ground plate. Soft AC voltage of frequency near natural frequency of the plate gives the electrostatic force that leads the elastic plate into vibration, more ...
Dumitru I. Caruntu, Reynaldo Oyervides
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A MEMS diamond hemispherical resonator
Journal of Micromechanics and Microengineering, 2013In this paper we report the fabrication of hemispherical polycrystalline diamond resonators fabricated on a novel high-temperature glass substrate. The hemispherical resonator gyroscope is one of the most accurate and rugged of the mechanical gyroscopes, and can be operated in either rate or whole-angle mode due to its high degree of symmetry.
J J Bernstein +5 more
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2010
As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO2), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties.
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As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO2), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties.
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2009
In this paper, we discuss various issues related to MEMS resonator design, in particular, design for high quality factor (Q). Our work focuses on ways to attain high-Q, especially in the context of non-vacuum packaged devices. We discuss the effect of fluid damping on the resonator response and point out two different routes to achieve high-Q by taking
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In this paper, we discuss various issues related to MEMS resonator design, in particular, design for high quality factor (Q). Our work focuses on ways to attain high-Q, especially in the context of non-vacuum packaged devices. We discuss the effect of fluid damping on the resonator response and point out two different routes to achieve high-Q by taking
openaire +1 more source