Results 221 to 230 of about 2,133 (253)
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2010
As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO2), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties.
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As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO2), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties.
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2009
In this paper, we discuss various issues related to MEMS resonator design, in particular, design for high quality factor (Q). Our work focuses on ways to attain high-Q, especially in the context of non-vacuum packaged devices. We discuss the effect of fluid damping on the resonator response and point out two different routes to achieve high-Q by taking
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In this paper, we discuss various issues related to MEMS resonator design, in particular, design for high quality factor (Q). Our work focuses on ways to attain high-Q, especially in the context of non-vacuum packaged devices. We discuss the effect of fluid damping on the resonator response and point out two different routes to achieve high-Q by taking
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Quartz resonator for MEMS oscillator
2014 European Frequency and Time Forum (EFTF), 2014A three-dimensional length-extension mode (3D-LEM) resonator has been developed for fundamental physics purpose showing a very good frequency stability potential highlighted by a Quality factor Frequency product (Q.F) above 1013. Those characteristics are quite interesting for time & frequency applications but since a 3D structure is difficult to ...
Beatrice Bourgeteau +7 more
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Damping effects in MEMS resonators
CAS 2012 (International Semiconductor Conference), 2012Damping effects are very important in MEMS-based sensors and actuators. In this paper we use analytical models and finite element (FE) computations to quantify the energy losses due to viscous fluid damping, acoustic radiation and thermo-elastic damping.
M. Gologanu +3 more
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MEMS resonator with digitally tunable resonant frequency
SPIE Proceedings, 2009This paper proposes, for the first time, a MEMS-based digitally tunable micromechanical resonator (DTMR). A general methodology of tuning the resonant frequency of a MEMS comb-driven resonator using digital voltages is presented. In this mechanism, a microelectromechanical digital-to-analog converter (MEMDAC) is employed as the tuning unit.
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The Journal of the Acoustical Society of America, 2006
A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure.
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A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure.
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On the role of interface dissipation in MEMS resonators
2012We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of ...
FRANGI, ATTILIO ALBERTO +3 more
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Microfabricated Aluminum Nitride MEMS Resonator
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2023Yuxin Zhang +5 more
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