Results 11 to 20 of about 50,856 (266)
Nanotexturing of Silicon by Metal-Assisted Chemical Etching
Фізика і хімія твердого тіла, 2016 This paper describes the method of metal assisted chemical etching (MacEtch) as an efficient approach for structuring the silicon surface with the ability to manage effectively the geometric parameters of the structures and their distribution on the ...
Ye. I. Berezhanskyi +3 more
doaj +2 more sources
Deep Etching of Silicon Based on Metal-Assisted Chemical Etching. [PDF]
ACS Omega, 2022 A deep etching method for silicon "micro"structures was successfully developed. This wet etching process is based on metal-assisted chemical etching (MACE), which was previously mainly utilized to etch the features that have lateral dimensions of "nanometers." In this novel MACE, the critical improvement was to promote the "out-of-plane" mass transfer ...
Nur'aini A, Oh I.
europepmc +3 more sources
Au-Capped GaAs Nanopillar Arrays Fabricated by Metal-Assisted Chemical Etching [PDF]
Nanoscale Research Letters, 2017 GaAs nanopillar arrays were successfully fabricated by metal-assisted chemical etching using Au nanodot arrays. The nanodot arrays were formed on substrates by vacuum deposition through a porous alumina mask with an ordered array of openings. By using an
Hidetaka Asoh +2 more
doaj +2 more sources
Black GaAs by Metal-Assisted Chemical Etching [PDF]
ACS Applied Materials & Interfaces, 2018 Large area surface microstructuring is commonly employed to suppress light reflection and enhance light absorption in silicon photovoltaic devices, photodetectors, and image sensors. To date, however, there are no simple means to control the surface roughness of III-V semiconductors by chemical processes similar to the metal-assisted chemical etching ...
Paola Lova +4 more
openaire +4 more sources
Kinked Silicon Nanowires: Superstructures by Metal-Assisted Chemical Etching [PDF]
Nano Letters, 2019 We report on metal-assisted chemical etching of Si for the synthesis of mechanically stable, hybrid crystallographic orientation Si superstructures with high aspect ratio, above 200. This method sustains high etching rates and facilitates reproducible results.
Georgiana Sandu +14 more
openaire +3 more sources
Comparing metal assisted chemical etching of N and P-type silicon nanostructures
Micro and Nano Engineering, 2023 Metal assisted chemical etching is a promising method for fabricating high aspect ratio micro- and nanostructures in silicon. Previous results have suggested that P-type and N-type silicon etches with different degrees of anisotropy, questioning the use ...
Hanna Ohlin +3 more
doaj +1 more source
Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching [PDF]
Технологія та конструювання в електронній апаратурі, 2013 The author suggests using the etching method MacEtch (metal-assisted chemical etching) for production of micro- and nanostructures of porous silicon. The paper presents research results on the morphology structures obtained at different parameters of ...
I. R. Iatsunskyi
doaj +2 more sources
Engineering high aspect-ratio silicon nanostructures
Physical Sciences and Technology, 2023 Large-area high density vertical silicon nanowire arrays are fabricated by metal-assisted chemical etching. Two-dimensional silica colloidal crystal template or laser interference lithography are used to create gold metal nanohole arrays on a silicon ...
Ali Belarouci +2 more
doaj +1 more source
Fabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching [PDF]
Journal of Nanostructures, 2014 In this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer.
P. Heydari +3 more
doaj +1 more source
Nanomaterials, 2023 Based on the widely used wet metal-assisted electroless etching, we develop in this work a novel vapor-phase silver-assisted chemical etching (VP-Ag-ACE) suitable for the elaboration of highly doped p-silicon (Si) nanostructures with strong, visible, and
Chohdi Amri +2 more
doaj +1 more source