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Vertical silicon nanostructures via metal-assisted chemical etching
2017Seyeong Lee +3 more
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Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon
ACS Applied Materials & Interfaces, 2016Vijay Kris Narasimhan, Yi Cui
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Formation of High Aspect Ratio GaAs Nanostructures with Metal-Assisted Chemical Etching
Nano Letters, 2011Jae Cheol Shin +2 more
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Damage-Free Smooth-Sidewall InGaAs Nanopillar Array by Metal-Assisted Chemical Etching
ACS Nano, 2017Lingyu Kong, Yi Song, Lan Yu
exaly
3D Etching technology for single crystal silicon using Metal-Assisted Chemical Etching.
The Proceedings of Mechanical Engineering Congress, JapanSatoshi Miyairi +5 more
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