Results 151 to 160 of about 2,189 (167)
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Calibration of the Wireless Unit of Micromechanical Accelerometers
Applied Mechanics and Materials, 2012The report describes an original method of calibrating an autonomous unit of wireless accelerometers manufactured by Microdevices Laboratory, Ltd [1]. Without the use of precision rotary tables, centrifuges, and an independent basement (against vibrations), it is possible to reduce the error caused by the mismatch (not orthogonal)of sensor’s axes. Zero
Alexey Timoshenkov +3 more
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Performance Analysis on Capacitance Micromechanical Comb-Finger Accelerometer
Key Engineering Materials, 2008Variable-capacitance micromechanical accelerometer is widely used because of its high sensitivity and low power. Therefore, the further study on its performance has much theoretical and applicable significance. This paper takes the closed-loop bias stationary comb-finger variable-capacitance accelerometer as an example, introduces its operation ...
Xue Mei Hu, Q.L. Han
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Integrated circuit layout design for a micromechanical accelerometer
2017 24th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS), 2017Layout design stage of an integrated circuit for a micromechanical accelerometer is considered. A method for automated placement of repeating elements of analog blocks is proposed. The method takes into account area restrictions and placement of a block digital part.
I. V. Lemko +5 more
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Application of microlever to micromechanical silicon resonant accelerometers
Optics and Precision Engineering, 2011A micromechanical Silicon Resonant Accelerometer(SRA) prototype fabricated by Deep Dry Silicon on Glass(DDSOG) process was presented.The amplification of single-stage microlever in the SRA to the interial force was researched,then it pointed out that the scale factor of SRA is proportional to the system amplification factor n.The theoretical model of ...
石然 SHI Ran +3 more
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Capacitive Accelerometer Made by Silicon Micromechanics
1990A capacitive accelerometer has been fabricated from Si 110 wafers using the silicon micromachining technique. The sensor basically consist out of an elastically suspended plate between two fixed capacitor plates.
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System Damping Ratio Analysis of a Capacitive Micromechanical Accelerometer
2005 6th International Conference on Electronic Packaging Technology, 2006In this paper, system damping ratio analysis and optimization of a capacitive MEMS accelerometer is performed. To investigate the influence of damping on the system dynamic characteristics the system dynamics equations with or without damping are solved.
null Liu Xiaowei +2 more
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Design and simulation of a multifinger micromechanical silicon accelerometer
SPIE Proceedings, 2001A kind of micromechanical silicon accelerometer with medium low performance designed for either commercial or military markets is described in this paper. Its sensitive element is a multi-finger micromechanical structure and its sensitive direction is parallel to the proof mass, which is fixed to the base through four folded beams. The accelerometer is
Jing-Xin Dong, Jun-Hua Qin
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Linearity enhancement of scale factor in an optical interrogated micromechanical accelerometer
Applied Optics, 2016A method to reduce the residual stress of support arms in an optical interrogated micromechanical accelerometer is proposed in order to enhance the linearity of the scale factor of the accelerometer. First, the behavior of residual stress in support arms is analyzed in detail, and the simulation of shape curvature caused by residual stress in aluminum ...
Yu, Zhang +3 more
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A micromechanical structure eliminating lateral effect of silicon accelerometer
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2002A novel two-mass micromechanical structure for a silicon accelerometer is described. In this structure, each mass is attached to the rim by two beams and a fifth beam bridges the two masses at the central area of the structure. An acceleration normal to the device plane can bring about significant stress in the central beam area while any lateral ...
null Bao Minhang +2 more
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Development of constructive-kinematic model of micromechanical accelerometers
Issues of radio electronics, 2019The article discusses the problem of improving the quality and competitiveness of MEMS based on the structural kinematic model built on new physical principles and laws. The relevancy is conditioned by Decree of the Government of the Russian Federation No.328 dated 15 April 2014 «On Approval of the State Program of the Russian Federation «Development ...
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