Recent Advances in the Design, Modeling, and Control of Flexure-Based Nanopositioning Stages [PDF]
MicromachinesFlexure-based nanopositioning stages have emerged as indispensable tools in advanced fields such as nanotechnology, semiconductor manufacturing, and biomedical engineering, where nanometer-scale precision is paramount. This paper presents a comprehensive
Yijie Liu
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High precision robust control design of piezoelectric nanopositioning platform [PDF]
Scientific Reports, 2022 The piezoelectric nanopositioning platform requires extremely accurate tracking during the task, while the model uncertainty caused by load variations requires strong robustness of the system.
Huan Feng, Aiping Pang, Hongbo Zhou
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High precision structured H∞ control of a piezoelectric nanopositioning platform. [PDF]
PLoS ONE, 2023 The inherent weakly damped resonant modes of the piezoelectric nanopositioning platform and the presence of model uncertainty seriously affect the performance of the system.
Huan Feng +3 more
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Adaptive Notch Filter for Piezo-Actuated Nanopositioning System via Position and Online Estimate Dual-Mode [PDF]
Micromachines, 2021 Due to the excellent advantages of high speed, high precision, and driving force, piezoelectric actuators nanopositioning systems have been widely used in various micro/nanomachining fields.
Chengsi Huang, Hongcheng Li
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Design and Analysis of Ultra-Precision Smart Cutting Tool for In-Process Force Measurement and Tool Nanopositioning in Ultra-High-Precision Single-Point Diamond Turning. [PDF]
Micromachines (Basel), 2023 Ultra-high-precision single-point diamond turning (SPDT) is the state-of-the-art machining technology for the advanced manufacturing of critical components with an optical surface finish and surface roughness down to one nanometer.
Hatefi S, Smith F.
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Precision Motion Control of a Piezoelectric Actuator via a Modified Preisach Hysteresis Model and Two-Degree-of-Freedom H-Infinity Robust Control [PDF]
Micromachines, 2023 The nonlinear hysteresis phenomenon can occur in piezoelectric-driven nanopositioning systems and can lead to reduced positioning accuracy or result in a serious deterioration of motion control. The Preisach method is widely used for hysteresis modeling;
Ayad G. Baziyad +2 more
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A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle [PDF]
Micromachines, 2022 The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale ...
Junhui Zhu +5 more
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Compensation Method for the Nonlinear Characteristics with Starting Error of a Piezoelectric Actuator in Open-Loop Controls Based on the DSPI Model [PDF]
Micromachines, 2023 Nanopositioning stages with piezoelectric actuators have been widely used in fields such as precision mechanical engineering, but the nonlinear start-up accuracy problem under open-loop control has still not been solved, and more errors will accumulate ...
Dong An +6 more
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Reinforcement Learning-Based Adaptive Control of a Piezo-Driven Nanopositioning System
IEEE Open Journal of the Industrial Electronics SocietyThis article proposes a new reinforcement learning (RL)-based adaptive control design for precision motion control of a two-degree-of-freedom piezoelectric XY nanopositioning system. In this design, an actor-critic structure is developed to eliminate the
Liheng Chen, Qingsong Xu
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Near-Field Direct Writing Based on Piezoelectric Micromotion for the Programmable Manufacturing of Serpentine Structures [PDF]
MicromachinesSerpentine microstructures offer excellent physical properties, making them highly promising in applications in stretchable electronics and tissue engineering.
Xun Chen +11 more
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