Results 161 to 170 of about 5,552 (189)
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Review of Scientific Instruments, 2023
Piezoelectric stick-slip driven nanopositioning stage (PSSNS) with nanometer resolution has been widely used in the field of micro-operation. However, it is difficult to achieve nanopositioning over large travel, and its positioning accuracy is affected ...
Keping Liu +5 more
semanticscholar +1 more source
Piezoelectric stick-slip driven nanopositioning stage (PSSNS) with nanometer resolution has been widely used in the field of micro-operation. However, it is difficult to achieve nanopositioning over large travel, and its positioning accuracy is affected ...
Keping Liu +5 more
semanticscholar +1 more source
IEEE Transactions on Automation Science and Engineering
This paper proposes a novel adaptive global sliding mode control strategy for a two-degree-of-freedom (2-DOF) piezoelectric nanopositioning system based on the integral extended state observer (IESO) technique.
Liheng Chen, Zehao Wu, Qingsong Xu
semanticscholar +1 more source
This paper proposes a novel adaptive global sliding mode control strategy for a two-degree-of-freedom (2-DOF) piezoelectric nanopositioning system based on the integral extended state observer (IESO) technique.
Liheng Chen, Zehao Wu, Qingsong Xu
semanticscholar +1 more source
Modeling and Control of a Piezo-Driven XYZ Series-Type Compliant Nanopositioning Stage
2023 IEEE 18th Conference on Industrial Electronics and Applications (ICIEA), 2023Precision positioning systems are essential for micro-nano scale technology, requiring compactness, large stroke, high accuracy, and motion decoupling in nanopositioning stages for fast and precise positioning.
Keqiang Zhou +5 more
semanticscholar +1 more source
Fuzzy-Based Adaptive Reliable Motion Control of a Piezoelectric Nanopositioning System
IEEE transactions on fuzzy systemsThe nonlinearity and cross-axis coupling of piezo-driven multiple-degree-of-freedom nanopositioning systems impose challenges to achieving precise and reliable motion control.
Liheng Chen, Qingsong Xu
semanticscholar +1 more source
IEEE Transactions on Automation Science and Engineering, 2022
Flexure-based scanning stages driven by piezoelectric (PZT) actuator with large stroke, nanoscale precision, and high bandwidth are quite appealing for developing an advanced multiphoton polymerization 3-D nanolithography system.
Hui Tang +4 more
semanticscholar +1 more source
Flexure-based scanning stages driven by piezoelectric (PZT) actuator with large stroke, nanoscale precision, and high bandwidth are quite appealing for developing an advanced multiphoton polymerization 3-D nanolithography system.
Hui Tang +4 more
semanticscholar +1 more source
A Damped Decoupled XY Nanopositioning Stage Embedding Graded Local Resonators
IEEE/ASME transactions on mechatronics, 2022Lightly damping linear dynamic characteristics of a flexure-based stage mainly limit control bandwidth when its piezo-actuating hysteresis is well compensated.
Zhong Chen +4 more
semanticscholar +1 more source
IEEE transactions on industrial electronics (1982. Print), 2022
This article presents a convex inner approximation approach for mixed ${H}_2$/${H}_\infty$ control of a flexure-based nanopositioning system. Generally for such positioning systems, the inevitable existence of model mismatch renders it often times ...
Jun Ma +6 more
semanticscholar +1 more source
This article presents a convex inner approximation approach for mixed ${H}_2$/${H}_\infty$ control of a flexure-based nanopositioning system. Generally for such positioning systems, the inevitable existence of model mismatch renders it often times ...
Jun Ma +6 more
semanticscholar +1 more source
Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide
IEEE transactions on industrial electronics (1982. Print), 2022Long stroke nanopositioning stages with high natural frequency and compact size are demanded in precision engineering. However, in previous researches, the natural frequency of the long stroke nanopositioning stage is normally below 50 Hz because the ...
Chi Zhang +4 more
semanticscholar +1 more source
IEEE transactions on industrial electronics (1982. Print)
For compliant nanopositioning stages, the closed-loop control can effectively reduce the trajectory tracking error caused by modeling uncertainties and unknown disturbances. However, pose sensing solutions with multiple degrees of freedom, high precision,
Hai Li +3 more
semanticscholar +1 more source
For compliant nanopositioning stages, the closed-loop control can effectively reduce the trajectory tracking error caused by modeling uncertainties and unknown disturbances. However, pose sensing solutions with multiple degrees of freedom, high precision,
Hai Li +3 more
semanticscholar +1 more source
IEEE/ASME transactions on mechatronics, 2021
A piezoelectric platform driven by a bionic quadruped piezoelectric actuator is developed. It uses the operating principle of combining bionic walking and swinging actuation modes to achieve nanopositioning in a large travel range.
Jie Deng +3 more
semanticscholar +1 more source
A piezoelectric platform driven by a bionic quadruped piezoelectric actuator is developed. It uses the operating principle of combining bionic walking and swinging actuation modes to achieve nanopositioning in a large travel range.
Jie Deng +3 more
semanticscholar +1 more source