Results 21 to 30 of about 5,555 (236)

A Digital Observer-Based Repetitive Learning Composite Control Method for Large Range Piezo-Driven Nanopositioning Systems

Machines, 2022
In this study, a novel digital compound compensation method is proposed to compensate for the hysteresis nonlinearity and the drift disturbance of a piezoelectric nanopositioning system with a large range.
Cunhuan Liu, Yongchun Fang, Yinan Wu, Zhi Fan   +3 more
doaj   +1 more source

Scanning effects in coherent fourier scatterometry [PDF]

Journal of the European Optical Society-Rapid Publications, 2012
Incoherent Fourier Scatterometry (IFS) is a successful tool for high accuracy nano-metrology. As this method uses only far field measurements, it is very convenient from the point of view of industrial applications.
Roy S., El Gawhary O., Kumar N., Pereira S. F., Urbach H. P.   +4 more
doaj   +1 more source

Linear Matrix Inequality Approach to Designing Damping and Tracking Control for Nanopositioning Application

Vibration, 2022
This paper presents a method to extend the eigenstructure assignment based design of the Positive Position Feedback (PPF) damping controller to the family of well-known second-order Positive Feedback Controllers (PFC) namely: (i) the Positive Velocity ...
Adedayo K. Babarinde, Sumeet S. Aphale
doaj   +1 more source

Fixed-Time Third-Order Super-Twisting-like Sliding Mode Motion Control for Piezoelectric Nanopositioning Stage

Mathematics, 2021
This paper presents a novel third-order super-twisting-like integral sliding mode controller (3-ISMC) for trajectory tracking of nanopositioning applications.
Guangwei Wang, Bo Wang, Chengxi Zhang
doaj   +1 more source

Preloading Piezoelectric Stack Actuator in High-speed Nanopositioning Systems

Frontiers in Mechanical Engineering, 2016
Recent development in high-speed nanotechnology applications such as scanning probe microscopy and nanofabrication has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems.
Yuen Yong
doaj   +1 more source

Butterworth Pattern-based Simultaneous Damping and Tracking Controller Designs for Nanopositioning Systems [PDF]

, 2016
Peer reviewedPublisher ...
Aphale, Sumeet Sunil, Feliu, Vicente, Russell, Douglas, San-Millan, Andres   +3 more
core   +2 more sources

Suppression of Air Refractive Index Variations in High-Resolution Interferometry

Sensors, 2011
The influence of the refractive index of air has proven to be a major problem on the road to improvement of the uncertainty in interferometric displacement measurements.
Zdeněk Buchta, Jan Hrabina, Martin Čížek, Ondřej Číp, Josef Lazar   +4 more
doaj   +1 more source

Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)

Proceedings, 2020
The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used ...
Jaqueline Stauffenberg, Ingo Ortlepp, Christoph Reuter, Mathias Holz, Denis Dontsov, Christoph Schäffel, Steffen Strehle, Jens-Peter Zöllner, Ivo W. Rangelow, Eberhard Manske   +9 more
doaj   +1 more source

A robust loop-shaping approach to fast and accurate nanopositioning [PDF]

, 2013
Peer ...
Aphale, Sumeet S., Ferreira, Antoine, Moheimani, S.O. Reza   +2 more
core   +3 more sources

Fuzzy-enhanced Dual-loop Control Strategy for Precise Nanopositioning [PDF]

, 2017
Postprin
Altaher, Mohammed Talib, Aphale, Sumeet Sunil   +1 more
core   +1 more source