Preloading Piezoelectric Stack Actuator in High-speed Nanopositioning Systems
Frontiers in Mechanical Engineering, 2016 Recent development in high-speed nanotechnology applications such as scanning probe microscopy and nanofabrication has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems.
Yuen Yong
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Butterworth Pattern-based Simultaneous Damping and Tracking Controller Designs for Nanopositioning Systems [PDF]
, 2016 Peer reviewedPublisher ...
Aphale, Sumeet Sunil +3 more
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Suppression of Air Refractive Index Variations in High-Resolution Interferometry
Sensors, 2011 The influence of the refractive index of air has proven to be a major problem on the road to improvement of the uncertainty in interferometric displacement measurements.
Zdeněk Buchta +4 more
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Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)
Proceedings, 2020 The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used ...
Jaqueline Stauffenberg +9 more
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A robust loop-shaping approach to fast and accurate nanopositioning [PDF]
, 2013 Peer ...
Aphale, Sumeet S. +2 more
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Piezoelectric MEMS Linear Motor for Nanopositioning Applications
Actuators, 2021 This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators.
Víctor Ruiz-Díez +5 more
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Fuzzy-enhanced Dual-loop Control Strategy for Precise Nanopositioning [PDF]
, 2017 Postprin
Altaher, Mohammed Talib +1 more
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Frequency Noise Properties of Lasers for Interferometry in Nanometrology
Sensors, 2013 In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of ...
Ondřej Číp +3 more
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Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner
Micromachines, 2021 Various tools, such as biomedical manipulators, optical aligners, and ultraprecision manufacturing tools, implement nanopositioners that must be dynamically tunable to satisfy the requirements of different working conditions.
Zeying Li, Pengbo Liu, Peng Yan
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An analytical approach to integral resonant control of second-order systems [PDF]
, 2013 Peer ...
Aleyaasin, M. +4 more
core +2 more sources