Results 91 to 100 of about 19,664 (279)

Multiple patterning bi-line/tri-line structure at limiting resolution for 7 nm by negative tone development of ArF immersion lithography

Alexandria Engineering Journal
Since the advanced Integrated Circuit (IC) manufacturing process has reached the 14 nm technology node and beyond, the pattern size of integrated circuits has become much smaller than the theoretical minimum resolution of lithography. In order to further
Jinhao Zhu, Liwan Yue, Qiang Wu, Yanli Li   +3 more
doaj   +1 more source

Fast optical proximity correction with timing optimization ready standard cells

, 2012
10.1117/12.916124Proceedings of SPIE - The International Society for Optical Engineering8327 ...
Qu, Y., Tong Heng Lee, Tay, A., Chun Huat Heng, Arthur Tay, Heng, C.H., Lee, T.H., Yifan Qu   +7 more
core   +1 more source

Microscopic Insights into Magnetic Warping and Time‐Reversal Symmetry Breaking in Topological Surface States of Rare‐Earth‐Doped Bi2Te3

Advanced Materials, EarlyView.
Magnetic doping of the topological insulator Bi2Te3 with erbium adatoms induces out‐of‐plane magnetism and breaks time‐reversal symmetry, opening a Dirac gap and driving a Fermi surface transition from hexagonal to star‐of‐David geometry. Microscopy, spectroscopy, and magnetic dichroism reveal atomically controlled magnetic interactions that tailor the
Beatriz Muñiz Cano, Fabián Calleja, Ji Dai, Massimo Tallarida, Vera Marinova, Alessandro Barla, Marc G. Cuxart, Pierluigi Gargiani, Gonzalo N. Molina, José Angel Silva‐Guillén, Adriana I. Figueroa, Kevin García‐Díez, Sergio O. Valenzuela, Aitor Mugarza, Amadeo L. Vázquez de Parga, Rodolfo Miranda, Francisco Guinea, Manuela Garnica, Miguel A. Valbuena   +18 more
wiley   +1 more source

Shaping intensity behind amplitude masks for proximity correction lithography: Design, measurement and realization

Proximity exposure techniques in lithography are getting more and more popular because of the cost of ownership advantage of mask aligners compared to projection systems.
Puthankovilakam, Krishnaparvathy, Tan, Qing, Herzig, Hans Peter, Bramati, Arianna, Scharf, Toralf, Nguyen, David, Vogler, Uwe, Voelkel, Reinhard   +7 more
core   +1 more source

Tuning Amorphous‐Crystalline Catalytic Interfaces by Mechanochemistry: Cu‐Based Metallic Glasses Coupled with Ceria for CO Oxidation

Advanced Materials, EarlyView.
Ball‐milling Cu‐based metallic glasses with ceria creates a unique nanostructure where metallic glass particles are wrapped by CeO2 nanoparticles. The intimate integration triggers copper state reorganization during reaction and aging, boosting CO oxidation and COPrOx activity.
Maahin Mirzay‐Shahim, Mehran Nabahat, Laia Pascua‐Solé, Isabel Serrano, Ilaria Lucentini, Xènia Garcia, Marina Armengol‐Profitós, Asier Agrelo‐Lestón, Ignasi Burgués‐Ceballos, Núria J. Divins, Ignacio J. Villar‐Garcia, Virginia Pérez‐Dieste, Carlos Escudero, Carlo Marini, Jordi Llorca, Eloi Pineda, Pere Bruna, Lluís Soler   +17 more
wiley   +1 more source

Polymorph‐Specific Electronic Transduction in WO3 during Molecular Sensing

Advanced Materials, EarlyView.
Metal‐oxide polymorphs with similar surface chemistry can nevertheless exhibit distinct sensing properties. In γ‐ and ε‐WO3, analyte adsorption appears comparable; yet, only ε‐WO3 induces a pronounced lattice electronic perturbation that accommodates charge in sub‐conduction band minimum states.
Matteo D'Andria, Meng Yin, Stefan Neuhauser, Vlasis G. Mavrantzas, Ying Chen, Ken Suzuki, Andreas T. Güntner   +6 more
wiley   +1 more source

Role of the Recombination Zone in Organic Light‐Emitting Devices

Advanced Materials, EarlyView.
This review summarizes the critical role of the recombination zone in organic light‐emitting diodes (OLEDs). We highlight that broadening the recombination zone in OLEDs based on emissive layers with balanced charge transport and high photoluminescence quantum yields provides a promising route toward achieving both long operational lifetime and high ...
Yungui Li, Karl Leo
wiley   +1 more source

Suitability of different in-water algorithms for eutrophic and absorbing waters applied to Sentinel-2 MSI and Sentinel-3 OLCI data

Frontiers in Remote Sensing
Optically complex waters present significant challenges for remote sensing due to high concentrations of optically active substances (OASs) and their inherent optical properties (IOPs), as well as the adjacency effect.
Ave Ansper-Toomsalu, Mirjam Uusõue, Mirjam Uusõue, Kersti Kangro, Kersti Kangro, Martin Hieronymi, Krista Alikas   +6 more
doaj   +1 more source

Printability and Line Edge Roughness of Optical Proximity Correction Features

, 2003
Optical Proximity Correction (OPC) has been used for many years now in the semiconductor industry to provide through-pitch focus and dose matching across an entire mask field. By adding sub-resolution features, lines with large duty ratios can be made to
Wittenzellner, John
core  

Viral Infection‐Inspired Autonomous Detection of Fusion‐Competent Viruses for Screening and Environmental Surveillance

Advanced Materials, EarlyView.
Inspired by viral entry mechanisms, the FUSION assay enables autonomous detection of respiratory viruses via membrane fusion–triggered CRISPR‐Cas13a activation. VEACON selectively fuses with fusion‐competent viruses, triggering fluorescence within confined vesicles.
Jae Chul Park, Yidam Song, Hyun‐Woo Choi, Jaeuk Sung, Harin Jin, WonSeok Gwak, Kirim Yoo, Soohwang Lee, Jongeon Park, Jeongmin Kim, Hye‐Jun Jo, Jahyun Koo, Youngdo Jeong, Kwan Hyi Lee, Seung‐Jung Kee, Hojun Kim   +15 more
wiley   +1 more source