Results 131 to 134 of about 421 (134)

Optical proximity correction (OPC) method for improving lithography process window

2001
openaire   +1 more source

Method of developing optimized optical proximity correction (OPC) fragmentation script for photolithographic processing

2006
BABCOCK CARL, CAPODIECI LUIGI
openaire   +1 more source

Optical proximity correction (OPC) technique using generalized figure of merit for photolithograhic processing

2005
openaire   +1 more source

Identify Optical Proximity Correction (OPC) issue in 0.13 /spl mu/m technology development

exaly