Results 111 to 120 of about 380 (120)
Some of the next articles are maybe not open access.

Etch proximity correction by integrated model-based retargeting and OPC flow

Proceedings of SPIE, 2007
Shumay Shang   +2 more
exaly  

Optical Proximity Correction With Linear Regression

IEEE Transactions on Semiconductor Manufacturing, 2008
Avideh Zakhor
exaly  

Reducing the pattern redundancy in optical proximity correction modeling by analyzing the pattern linearity

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2010
Qiliang Yan, Lawrence S Melvin
exaly  

Model-Based Initial Bias (MIB): Toward a Single-Iteration Optical Proximity Correction

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2016
Ayman Hamouda   +2 more
exaly  

Process-Variation-Aware Rule-Based Optical Proximity Correction for Analog Layout Migration

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2017
Xuan Dong, Lihong Zhang
exaly  

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