Results 251 to 260 of about 159,755 (262)

In-situ balancing for phase-shifting mask

2003
DAO GIANG, QIAN QI-DE
openaire   +3 more sources

ALTERNATING PHASE SHIFT MASKING FOR MULTIPLE LEVELS OF MASKING RESOLUTION

2002
openaire   +2 more sources

MULTILAYER ATTENUATING PHASE-SHIFT MASKS

2000
openaire   +3 more sources

METHOD FOR REPAIRING PHASE SHIFT MASKS

2009
ZIBOLD AXEL, KUSCHNERUS PETER, KIENZLE OLIVER   +2 more
openaire   +2 more sources

PHASE MASK DESIGN AND PHASE MASK FOR WRITING OPTICAL FIBRE BRAGG GRATINGS

2003
SHENG YUNLONG, ROTHENBERG JOSHUA E, LI HONGPU, WANG YING, ZWEIBACK JASON   +4 more
openaire   +1 more source

Method for eliminating phase conflict centers in alternating phase masks, and method for producing alternating phase masks

2005
LUDWIG BURKHARD, MOUKARA MOLELA
openaire   +1 more source

Measuring phase errors on phase shift masks

2008
ADEL MICHAEL, GHINOVKER MARK, MACK CHRIS A   +2 more
openaire   +1 more source

Alternating phase shift mask

2020
YU DAN, BOWSER AARON MICHAEL
openaire   +2 more sources

Phase-shift mask with assist phase regions

2012
HSIEH ROBERT L, FLACK WARREN W
openaire   +1 more source

TRANSMISSION AND PHASE BALANCE FOR PHASE-SHIFTING MASK

2002
QIAN QI-DE, WILMAN TSAI
openaire   +1 more source