Suppression of Interface Traps and Improved Breakdown in Recessed-Gate AlGaN/GaN MISHEMTs Using Low-Temperature Nitrogen Passivation. [PDF]
Chen HC +6 more
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The Influence of Non-Thermal Plasma Treatment on Osseointegration of Endosteal Implants Presenting Decompressing Vertical Chambers. [PDF]
Mehra S +9 more
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Thickness-dependent structural evolution of a-C:H layers formed by one-step Ar/CH<sub>4</sub> plasma reduction for direct Cu bonding. [PDF]
Lee H, Kim SE.
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Patterning of Lead Halide Perovskite Device Stacks on CMOS Readout Using Selective Microfabrication Protocols. [PDF]
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Remote Plasma Selective Silicon Etching Enabled Tunable Sub-Fin Process for Improved Parasitic Bottom Channel Control in Gate-All-Around Nanosheet Field-Effect Transistors. [PDF]
Li J, Gao Y, Zhang DW.
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Osseointegration of implant with various surface treatments. [PDF]
Kalawat A +6 more
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Numerical simulation of plasma-chemical etching reactors
1997 21st International Conference on Microelectronics. Proceedings, 2002The effect of nonisothermality of the operating continuum on the etching rate and uniformity in a planar plasma-chemical reactor was analyzed. The temperature of an electrode with a wafer was assumed specified and varied in a range which is characteristic for such reactors. Convection, molecular conduction and radiation were taken into account.
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Spectral investigation of the plasma-chemical etching of silicon dioxide
Journal of Applied Spectroscopy, 1979Practical investigations in the past few years have shown the promising nature of the use of the plasma-chemical method of etching silicon dioxide films during the production of integrated circuits. Nevertheless, with rare exceptions [1-3], the available studies were carried out without calling upon modern diagnostic methods for studying the plasma ...
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