Results 31 to 40 of about 92,867 (295)
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control [PDF]
, 1994 Very deep trenches (up to 200 µm) with high aspect ratios (up to 10) in silicon and polymers are etched using a fluorine-based plasma (SF6/O2/CHF3). Isotropic, positively and negatively (i.e.
de Boer, Meint J. +4 more
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RF reactor with asymmetrical electrodes for reactive ion etching of semiconductors [PDF]
Технологія та конструювання в електронній апаратурі, 2011 Results of experimental and theoretical study of RF CCP reactor for reactive ion etching of semiconductors are presented. Breakdown curve and domain of the discharge existence are measured in various gases (argon, fluorocarbon, oxygen).
S. V. Dudin +3 more
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CrystalsThe present study presents the results of an analytical and experimental investigation on the behaviour of Al2O3 particles injected into the plasma jet.
Viktorija Grigaitienė +3 more
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Scientific Reports, 2023 Aiming at the energy efficient use and valorization of carbon dioxide in the framework of decarbonization studies and hydrogen research, a novel dielectric barrier discharge (DBD) reactor has been designed, constructed and developed.
Nicola Lisi +4 more
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Micromachining of electret materials, advantages and possibilities [PDF]
, 1988 A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively.
Bergveld, P., Voorthuyzen, J.A.
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E3S Web of Conferences, 2018 Biodiesel is one of renewable energy alternatives, as a substitution of diesel engine fuel or diesel oil. Indonesian palm oil contains the fatty acids needed for the synthesis of FAME (fatty acid methyl ester) as the basic ingredient of biodiesel ...
Fakhri Saphira Nurina +2 more
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Crystals, 2019 A 2.45 GHz microwave-plasma chemical-vapor deposition (MPCVD) reactor was designed and built in-house by collaborating with Guangdong TrueOne Semiconductor Technology Co., Ltd.
Qijun Wang +5 more
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Plasma Chemical Method of Decreasing the Ethylene Impurities in the Air
East European Journal of Physics, 2021 The efficiency of ethylene impurities decomposition in barrierless plasma-chemical system during artificial injection into the air of a sea container has been studied. The experimental study was performed at the air temperature 5oC in container volume 65
Leonid M. Zavada, Dmytro V. Kudin
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Carbon Dioxide Splitting: A Summary of the Peer-Reviewed Scientific Literature [PDF]
, 2008 Increasing concentrations of carbon dioxide (CO2) in the atmosphere have stimulated significant global research and development efforts regarding the reduction in CO2 emissions from all point and non-point sources. In addition to technologies that do not
Sierra Rayne
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Application of non-thermal plasma reactor for degradation and detoxification of high concentrations of dye Reactive Black 5 in water [PDF]
Journal of the Serbian Chemical Society, 2016 Degradation and detoxification efficiency of high concentrations of commercially available reactive textile dye Reactive Black 5 solution (40, 80, 200, 500, 1000 mg L-1), were studied.
Dojčinović Biljana P. +7 more
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