Results 231 to 240 of about 17,992 (248)

High-κ Dielectric on ReS2: In-Situ Thermal Versus Plasma-Enhanced Atomic Layer Deposition of Al2O3

Materials, 2019
Robert M Wallace, Massimo Catalano, Ava Khosravi   +2 more
exaly  

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thin Solid Films, 2014
Simo-Pekka Hannula, Oili M E Ylivaara, Riikka Puurunen   +2 more
exaly  

Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice

Nanomaterials, 2019
Jianguo Yang, Tien-Chien Jen, Jijun Feng   +2 more
exaly  

Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Christophe Vallée, Remy Gassilloud, Vallée Christophe   +2 more
exaly  

Novel Cyclosilazane-Type Silicon Precursor and Two-Step Plasma for Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride

ACS Applied Materials & Interfaces, 2018
Won-Jun Lee, Jae-Min Park
exaly  

PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS

2020
PATSCHEIDER JÖRG, ROHRMANN HARTMUT, WEICHART JÜRGEN, BRITT FLORIAN   +3 more
openaire   +1 more source

An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Angewandte Chemie - International Edition, 2018
Detlef Rogalla, Nils Boysen, Thomas Riedl   +2 more
exaly  

Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Zhongwei Liu, Liu Zhongwei
exaly  

Topographic Selective Deposition (TSD) by Combining Plasma Enhanced Atomic Layer Deposition and Atomic Layer Etching Processes

2021
Jaffal, Moustapha, Lefevre, Gauthier, Yeghoyan, Taguhi, Chevolleau, Thierry, Gassilloud, Rémy, Posseme, Nicolas, Bonvalot, Marceline   +6 more
openaire   +1 more source

A PLASMA ENHANCED ATOMIC LAYER DEPOSITION SYSTEM AND METHOD

2007
openaire   +2 more sources