Results 241 to 248 of about 17,992 (248)

Apparatus and process for plasma-enhanced atomic layer deposition

2010
MA PAUL, SHAH KAVITA, WU DIEN-YEH, GANGULI SESHADRI, MARCADAL CHRISTOPHE, WU FREDERICK C, CHU SCHUBERT S   +6 more
openaire   +3 more sources

Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma

ACS Applied Materials & Interfaces
Chin-Wook Chung, Hyeongtag Jeon, Minseok Kim   +2 more
exaly  

HEMTs with an AlxGa1-xN Barrier layer Grown by Plasma Enhanced Atomic Layer Deposition

2018
CHEN MIIN-JANG, LEE WEI-HAO, SHIH HUAN-YU   +2 more
openaire   +2 more sources

High voltage, low pressure plasma enhanced atomic layer deposition

2020
openaire   +2 more sources

Optimization of Plasma-Enhanced Atomic Layer Deposition of Cobalt for Interconnects

2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Sandra Schujman, Natalya Tokranova, Van Long Nguyen, Christophe Vallée, Vidya Kaushik   +4 more
openaire   +1 more source

Plasma enhanced atomic layer deposition with pulsed plasma exposure

2015
SIMS JAMES S, HENRI JON, KELCHNER KATHRYN M, JANJAM SATHISH BABU S V, TANG SHANE   +4 more
openaire   +1 more source

Plasma enhanced atomic layer deposition of silicon-containing films

2008
THRIDANDAM HAREESH, XIAO MANCHAO, LEI XINJIAN, GAFFNEY THOMAS RICHARD, KARWACKI EUGENE JOSEPH JR   +4 more
openaire   +1 more source

CONTROLLED COMPOSITION USING PLASMA-ENHANCED ATOMIC LAYER DEPOSITION

2008
openaire   +1 more source