Results 1 to 10 of about 7,248 (265)
Atomic Layer Deposition (ALD) of Metal Gates for CMOS [PDF]
Applied Sciences, 2019 The continuous down-scaling of complementary metal oxide semiconductor (CMOS) field effect transistors (FETs) had been suffering two fateful technical issues, one relative to the thinning of gate dielectric and the other to the aggressive shortening of ...
Chao Zhao, Jinjuan Xiang
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Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It. [PDF]
ACS Mater Au, 2023 Due to concerns on resources depletion, climate change, and overall pollution, the quest toward more sustainable processes is becoming crucial. Atomic layer deposition (ALD) is a versatile technology, allowing for the precise coating of challenging substrates with a nanometer control over thickness.
Weber M +7 more
europepmc +4 more sources
Optical properties of ZnO deposited by atomic layer deposition (ALD) on Si nanowires [PDF]
Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2018 In this work, we report proof-of-concept results on the synthesis of Si core/ ZnO shell nanowires (SiNWs/ZnO) by combining nanosphere lithography (NSL), metal assisted chemical etching (MACE) and atomic layer deposition (ALD). The structural properties of the SiNWs/ZnO nanostructures prepared were investigated by X-ray diffraction, Raman spectroscopy ...
Octavio Graniel +2 more
exaly +5 more sources
Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
Nanomaterials, 2022 The atomic layer technique is generating a lot of excitement and study due to its profound physics and enormous potential in device fabrication. This article reviews current developments in atomic layer technology for spintronics, including atomic layer ...
Yuanlu Tsai, Zhiteng Li, Shaojie Hu
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Investigations of CrN/TiO2 coatings obtained in a hybrid PVD/ALD method on Al-Si-Cu alloy substrate [PDF]
Bulletin of the Polish Academy of Sciences: Technical Sciences, 2023 The paper addresses an important scientific topic from the utilitarian point of view concerning the surface treatment of Al-Si-Cu aluminum alloys by PVD/ALD hybrid coating deposition. The influence of the conditions of deposition of titanium oxide in CrN/
Marcin Staszuk
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Material manufacturing from atomic layer
International Journal of Extreme Manufacturing, 2023 Atomic scale engineering of materials and interfaces has become increasingly important in material manufacturing. Atomic layer deposition (ALD) is a technology that can offer many unique properties to achieve atomic-scale material manufacturing ...
Xinwei Wang, Rong Chen, Shuhui Sun
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Nanomaterials, 2022 In this paper, we present a study on thermal conductivity and viscosity of nanofluids containing novel atomic layer deposition surface-modified carbon nanosphere (ALD-CNS) and carbon nanopowder (ALD-CNP) core-shell nanocomposites. The nanocomposites were
Marcell Bohus +8 more
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Special Issue “ALD Technique for Functional Coatings of Nanostructured Materials”
Nanomaterials, 2022 Atomic layer deposition (ALD) is a vapor-phase technique that consists of the alternation of separated self-limiting surface reactions, which enable film thickness to be accurately controlled at the angstrom level, based on the former atomic layer ...
Javier Garcia Fernández +2 more
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Atomic layer deposition (ALD) on inorganic or polymeric membranes [PDF]
Journal of Applied Physics, 2019 Membranes can be defined as physical barriers allowing the selective transport of species. This tutorial aims to provide the basics of membrane technologies and materials, the fundamentals of the atomic layer deposition (ALD) technique, and, most importantly, to describe how to efficiently perform ALD on different membrane substrates.
Matthieu Weber +3 more
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Epitaxy from a Periodic Y–O Monolayer: Growth of Single-Crystal Hexagonal YAlO3 Perovskite
Nanomaterials, 2020 The role of an atomic-layer thick periodic Y–O array in inducing the epitaxial growth of single-crystal hexagonal YAlO3 perovskite (H-YAP) films was studied using high-angle annular dark-field and annular bright-field scanning transmission electron ...
Minghwei Hong +7 more
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