Atomic Layer Deposition (ALD) of Metal Gates for CMOS [PDF]
Applied Sciences, 2019 The continuous down-scaling of complementary metal oxide semiconductor (CMOS) field effect transistors (FETs) had been suffering two fateful technical issues, one relative to the thinning of gate dielectric and the other to the aggressive shortening of ...
Chao Zhao, Jinjuan Xiang
doaj +2 more sources
Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It. [PDF]
ACS Mater Au, 2023 Due to concerns on resources depletion, climate change, and overall pollution, the quest toward more sustainable processes is becoming crucial. Atomic layer deposition (ALD) is a versatile technology, allowing for the precise coating of challenging substrates with a nanometer control over thickness.
Weber M +7 more
europepmc +4 more sources
Atomic layer deposition (ALD) on inorganic or polymeric membranes [PDF]
Journal of Applied Physics, 2019 Membranes can be defined as physical barriers allowing the selective transport of species. This tutorial aims to provide the basics of membrane technologies and materials, the fundamentals of the atomic layer deposition (ALD) technique, and, most importantly, to describe how to efficiently perform ALD on different membrane substrates.
Matthieu Weber +3 more
openaire +1 more source
Proceedings, 2019 Atomic layer deposition (ALD) is a chemical vapor deposition (CVD) deposition method inwhich high-quality [...]
Engin Ciftyurek +5 more
doaj +1 more source
Bifunctional earth-abundant phosphate/phosphide catalysts prepared via atomic layer deposition for electrocatalytic water splitting [PDF]
, 2019 The development of active and stable earth-abundant catalysts for hydrogen and oxygen evolution is one of the requirements for successful production of solar fuels.
Dendooven, Jolien +7 more
core +2 more sources
Nanomaterials, 2020 ZnO is a remarkable material with many applications in electronics and catalysis. Atomic layer deposition (ALD) of ZnO on flat substrates is an industrially applied and well-known process.
Piyush Ingale +5 more
doaj +1 more source
Chemical vapour deposition and atomic layer deposition of amorphous and nanocrystalline metallic coatings: towards deposition of multimetallic films [PDF]
, 2009 This paper provides a prospective insight on chemical vapour deposition (CVD) and atomic layer deposition (ALD) as dry techniques for the processing of amorphous and nanocrystalline metallic thin films.
Blanquet, Elisabeth +3 more
core +5 more sources
GaAs interfacial self-cleaning by atomic layer deposition [PDF]
, 2008 The reduction and removal of surface oxides from GaAs substrates by atomic layer deposition (ALD) of Al2O3 and HfO2 are studied using in situ monochromatic x-ray photoelectron spectroscopy.
A. M. Sonnet +12 more
core +1 more source
Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition [PDF]
, 2016 We report the design of a mobile setup for synchrotron based in situ studies during atomic layer processing. The system was designed to facilitate in situ grazing incidence small angle x-ray scattering (GISAXS), x-ray fluorescence (XRF), and x-ray ...
Alessandro Coati +10 more
core +2 more sources
Atomic layer deposition to heterostructures for application in gas sensors
International Journal of Extreme Manufacturing, 2023 Atomic layer deposition (ALD) is a versatile technique to deposit metals and metal oxide sensing materials at the atomic scale to achieve improved sensor functions.
Hongyin Pan +5 more
doaj +1 more source