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Analysis and improvement of the pad wear profile in fixed abrasive polishing
International Journal of Advanced Manufacturing Technology, 2015N Y Nguyen, Z W Zhong, Zhong Z W
exaly
Estimating chemical mechanical polishing pad wear with compressibility
International Journal of Advanced Manufacturing Technology, 2006exaly
Factors influencing the dressing rate of chemical mechanical polishing pad conditioning
International Journal of Advanced Manufacturing Technology, 2006exaly
Development of Environment-Friendly Polishing Pad
Preprints of Annual Meeting of The Ceramic Society of JapanPreprints of Fall Meeting of The Ceramic Society of Japan, 2003
SATO, Makoto +2 more
openaire +1 more source