Combined magnetron sputtering and pulsed laser deposition of TiO 2 and BFCO thin films [PDF]
We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films.
D. Benetti +6 more
doaj +5 more sources
Plasma diagnostics of hybrid magnetron sputtering and pulsed laser deposition
This paper investigates the use of advanced triggering to synchronize a pulsed laser ablated plasma from a ceramic target with a pulsed DC sputtering plasma from a metal target for the purposes of depositing nanocomposite thin-films at low substrate ...
C Muratore
exaly +4 more sources
The Impact of Laser Irradiation on Thin ZrN Films Deposited by Pulsed DC Magnetron Sputtering
Transition metal nitrides have extensive applications, including magnetic storage devices, hardware resistance coatings, and low-temperature fuel cells.
Ameena Nazneen, Penghui Lei, Di Yun
doaj +4 more sources
Synergistic Suppression of Secondary Electron Yield from Al2O3 Ceramic Windows by TiN Film and Laser Surface Texturing [PDF]
To suppress the Secondary Electron Yield (SEY) of Al2O3 ceramic surfaces for accelerator ceramic windows, a synergistic strategy integrating TiN film deposition and laser surface texturing was developed. TiN films were first deposited on Al2O3 substrates
Baolong Ma +10 more
doaj +2 more sources
Anti-laser Irradiation Ability of VO2 Films Against Pulsed Power Laser
Thermochromic VO2 film was fabricated on quartz substrate through sputtering oxidation coupling method, and its optical properties were also investigated.
TIAN Ye +7 more
doaj +2 more sources
Quantification of self-sputtering and implantation during pulsed laser deposition of gold [PDF]
This work reports on the quantification of self-sputtering and implantation occurring during pulsed laser deposition of Au as a function of the laser fluence used to ablate the gold target.
Perea, Ángel +6 more
core +7 more sources
Evidence for self-sputtering during pulsed laser deposition of Zn [PDF]
4 pags. ; 4 figs.Thin films of Zn have been prepared by pulsed laser deposition with a KrF excimer laser (248 nm). The laser energy density (E.D.) on the target has been varied in the 1 to 5 J/cm2 range. The results show that as the E.D.
Haro-Poniatowski, E. +7 more
core +3 more sources
Laser-Based Selective Removal of EMI Shielding Layers in System-in-Package (SiP) Modules [PDF]
With the increasing complexity and integration density of System-in-Package (SiP) technologies, the demand for selective electromagnetic interference (EMI) shielding is growing.
Xuan-Bach Le +3 more
doaj +2 more sources
Yttria-stabilized zirconia thin films deposited by pulsed-laser deposition and magnetron sputtering
International audienceYttria-stabilized zirconia (YSZ, ZrO2:Y2O3) was deposited on (100) silicon by two physical vapor deposition techniques: pulsed laser deposition (PLD) and reactive magnetron sputtering (RMS).
E Millon +2 more
exaly +2 more sources
Electrochromic lithium nickel oxide by pulsed laser deposition and sputtering [PDF]
Thin films of lithium nickel oxide were deposited by sputtering and pulsed laser deposition (PLD) from targets of pressed LiNiO{sub 2} powder. The composition and structure of these films were analyzed using a variety of techniques, such as nuclear ...
Rottkay, K. von +5 more
core +3 more sources

