Results 11 to 20 of about 6,134 (297)

Combined magnetron sputtering and pulsed laser deposition of TiO 2 and BFCO thin films [PDF]

open access: yesScientific Reports, 2017
We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films.
D. Benetti   +6 more
doaj   +5 more sources

Plasma diagnostics of hybrid magnetron sputtering and pulsed laser deposition

open access: yesSurface and Coatings Technology, 2006
This paper investigates the use of advanced triggering to synchronize a pulsed laser ablated plasma from a ceramic target with a pulsed DC sputtering plasma from a metal target for the purposes of depositing nanocomposite thin-films at low substrate ...
C Muratore
exaly   +4 more sources

The Impact of Laser Irradiation on Thin ZrN Films Deposited by Pulsed DC Magnetron Sputtering

open access: yesNanomaterials
Transition metal nitrides have extensive applications, including magnetic storage devices, hardware resistance coatings, and low-temperature fuel cells.
Ameena Nazneen, Penghui Lei, Di Yun
doaj   +4 more sources

Synergistic Suppression of Secondary Electron Yield from Al2O3 Ceramic Windows by TiN Film and Laser Surface Texturing [PDF]

open access: yesNanomaterials
To suppress the Secondary Electron Yield (SEY) of Al2O3 ceramic surfaces for accelerator ceramic windows, a synergistic strategy integrating TiN film deposition and laser surface texturing was developed. TiN films were first deposited on Al2O3 substrates
Baolong Ma   +10 more
doaj   +2 more sources

Anti-laser Irradiation Ability of VO2 Films Against Pulsed Power Laser

open access: yesJournal of Aeronautical Materials, 2017
Thermochromic VO2 film was fabricated on quartz substrate through sputtering oxidation coupling method, and its optical properties were also investigated.
TIAN Ye   +7 more
doaj   +2 more sources

Quantification of self-sputtering and implantation during pulsed laser deposition of gold [PDF]

open access: yesJournal of Applied Physics, 2013
This work reports on the quantification of self-sputtering and implantation occurring during pulsed laser deposition of Au as a function of the laser fluence used to ablate the gold target.
Perea, Ángel   +6 more
core   +7 more sources

Evidence for self-sputtering during pulsed laser deposition of Zn [PDF]

open access: yesApplied Physics A, 2004
4 pags. ; 4 figs.Thin films of Zn have been prepared by pulsed laser deposition with a KrF excimer laser (248 nm). The laser energy density (E.D.) on the target has been varied in the 1 to 5 J/cm2 range. The results show that as the E.D.
Haro-Poniatowski, E.   +7 more
core   +3 more sources

Laser-Based Selective Removal of EMI Shielding Layers in System-in-Package (SiP) Modules [PDF]

open access: yesMicromachines
With the increasing complexity and integration density of System-in-Package (SiP) technologies, the demand for selective electromagnetic interference (EMI) shielding is growing.
Xuan-Bach Le   +3 more
doaj   +2 more sources

Yttria-stabilized zirconia thin films deposited by pulsed-laser deposition and magnetron sputtering

open access: yesSurface and Coatings Technology, 2011
International audienceYttria-stabilized zirconia (YSZ, ZrO2:Y2O3) was deposited on (100) silicon by two physical vapor deposition techniques: pulsed laser deposition (PLD) and reactive magnetron sputtering (RMS).
E Millon   +2 more
exaly   +2 more sources

Electrochromic lithium nickel oxide by pulsed laser deposition and sputtering [PDF]

open access: yes, 1996
Thin films of lithium nickel oxide were deposited by sputtering and pulsed laser deposition (PLD) from targets of pressed LiNiO{sub 2} powder. The composition and structure of these films were analyzed using a variety of techniques, such as nuclear ...
Rottkay, K. von   +5 more
core   +3 more sources

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