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Comparison Of Aln Films Synthesized By Pulsed Laser Ablation And Magnetron Sputtering Techniques

MRS Proceedings, 1997
ABSTRACTA comparative study is reported on the aluminum nitride (AIN) films on Si (111) substrate deposited by pulsed laser deposition and reactive magnetron sputtering. The structure, bonding characteristics, relative impurity levels, and wear resistance have been investigated to compare these films. We have used the techniques such as high resolution
K. Jagannadham   +4 more
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Studies on SiC film deposited by pulsed XeCl excimer laser sputtering method

Physica B: Condensed Matter, 1996
Abstract Thin films of SiC were grown by pulsed excimer laser deposition (PLD). The quality and structure of the films were examined by AES, XPS, TEM, SEM, XRD and IR. The deposited films were dense and uniform and stuck tightly to the substrates. The compositions of the films were quite uniform and the ratio of silicon to carbon atomic in the films ...
Yuxia Wang   +4 more
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Laser-pulse sputtering of atoms and molecules .2. Recondensation effects

1994
When solids are sputtered with sufficiently intense laser pulses, particle release takes place, and a terminating expansion then develops. The resulting gas-dynamic processes depend on whether backscattered particles are subject to recondensation or reflection. We here wish to examine the problem further with emphasis on-recondensation effects.
R. Kelly, Miotello, Antonio
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Gas-Dynamic Effects in Laser Pulse Sputtering of Aluminium

Materials Science Forum, 1994
Peterlongo, Andrea   +2 more
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Gas dynamics of the pulsed emission of a perfect gas with applications to laser sputtering and to nozzle expansion

Physical Review A, 1992
Particles released from a target surface by laser-pulse bombardment normally collide with each other and, as a result, exhibit three limiting categories of gas-dynamic behavior. One possibility, (a), is that the particles pass directly into unsteady adiabatic expansion (UAE), a problem for which an analytical solution already exists. Alternatively, (b),
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On the direct observation of the gas-dynamics of laser-pulse sputtering of polymers

Applied Physics B Photophysics and Laser Chemistry, 1991
R. Kelly, B. Braren
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Synthesis of Large-Area Crystalline MoS2 by Sputter Deposition and Pulsed Laser Annealing

ACS Applied Electronic Materials, 2023
Di Russo, Enrico   +11 more
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Synthesis of GeSn alloys by sputter deposition and Pulsed Laser Melting

The realization of high Sn content Ge1-ySny alloys has been the center of numerous research studies over the last two decades. The reason for this lies in the fact that a Sn concentration higher than the solid solubility limit (1 at. %) lowers the Ge conduction band minima until reaching the crossover from indirect to direct bandgap.
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Resonant photoionization of sputtered organic molecules by femtosecond UV laser pulses

Organic Mass Spectrometry, 1992
R. Möllers   +3 more
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