Contribution of vaporization and boiling to thermal-spike sputtering by ions or laser pulses
Physical Review E, 1999Here we consider what, in our terminology, we designate as normal vaporization, normal boiling, and phase explosion. In the case of vaporization, one is dealing with the emission of particles (atoms or molecules) from the extreme outer surface of either a solid or liquid for any temperature exceeding 0 K.
R. Kelly, Miotello, Antonio
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Synthesis of tungsten silicide by pulsed laser irradiation of sputtered alloy layers
Thin Solid Films, 1993Abstract Tungsten silicide was synthesized by multipulse XeCl laser irradiation of co-sputtered WSi mixtures 140 and 460 nm thick on single-crystal silicon wafers. It is shown that at certain equilibria between contradictory influences of the depth of melting, stress generation, intermixing and crystallization it is possible to grow good quality ...
S. LUBY +5 more
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Pulse Laser Removal of Sputtered Oxide Films: Measurement of Adhesion Strength
CLEO/Europe Conference on Lasers and Electro-Optics, 1998Heating power of continuous lasers (CO2) has been demonstrated to motivate the spall of coatings by generating compressive stress in the coating1. On the other hand, dynamic spallation of coatings can be checked by using pulsed lasers, as shown in the pionnering work presented by Vossen2.
R. Oltra, C. Sartori, J.P. Boquillon
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Laser-pulse sputtering of aluminum: Vaporization, boiling, superheating, and gas-dynamic effects
Physical Review E, 1994We have developed a numerical method to describe laser-pulse sputtering of Al in a thermal regime. The irradiation consists of a single pulse of triangular form having a duration of 30 ns. The laser light is assumed to be absorbed according to a simple exponential mechanism.
A. Peterlongo +2 more
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The dynamics of ion expulsion in ultrashort pulse laser sputtering of Al2O3
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2000Abstract The mechanism and dynamics of ion expulsion in near IR, ultrashort pulse laser sputtering, or ablation, of c-Al2O3 is studied using a combination of time-of-flight mass spectrometry and femtosecond laser pump-probe techniques. Coulomb explosion (CE) is identified as the dominant mechanism for ion expulsion under low fluence irradiation with ...
R. Stoian +5 more
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YBaCuO Films by Pulsed Laser Deposition and Sputtering
1993In-situ YBa2Cu3O7 films of high quality (from a Jc(T, H) and Tc point of view) have been fabricated by both, pulsed laser deposition (PLD), and on-axis rf magnetron sputtering techniques on SrTiO3 (100) and LaA103 (100) substrates. In the PLD method, a pulsed Nd:YAG laser with the 355 nm tripled wave length and the energy density of 8 J/cm2 has been ...
T. Koga, J. H. Xu, B. M. Moon, K. V. Rao
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Magnetron Sputtered Pulsed Laser Deposition Scale Up
2003Abstract : The objective was primarily to utilize the newly developed Air Force super-hard coating process technologies in practical applications, such as turbine engine rotor components, precision shafts and ball bearings, and bearing races. This would give the Air Force the capability of practically coating real precision mechanical parts with solid ...
Jeffery J. Heyob, Samuel J. Laube
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A new approach to thermal-spike sputtering with ions and laser pulses
Materials Science and Engineering: A, 1998The interactions of ion beams and laser pulses with solid or liquid surfaces have much in common, though different levels of importance. One recognizes processes which could be termed ballistic, thermal, electronic, and defect induced. These similarities have already been reviewed adequately so we propose here to concentrate only on thermal processes ...
R. Kelly, Miotello, Antonio
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Superthermal Energy of Nascent Atomic Gold in Pulsed Laser Sputtering
Heat Transfer: Volume 2 — Symposium on Fire and Combustion Systems; Thermal-Hydraulics in Nuclear and Hazardous Waste Processing and Disposal; Transport Phenomena in Materials Processing, 1995Abstract In an earlier work it was reported that the nascent monatomic flux of gold, sputtered from the bulk with a KrF (λ=248 nm, τp=16 ns) excimer laser at fluences below plasma ignition, had a mean translational energy much too high to reconcile with the classical thermal model of evaporation.
Ted D. Bennett +2 more
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Gas-dynamic effects in the laser-pulse sputtering of AlN: is there evidence for phase explosion?
Applied Surface Science, 1998Abstract The overall light intensity (fluorescence) of the sputtered atoms, ions, and molecules has been measured for polycrystalline AlN which was bombarded with 248 nm laser pulses in the presence of a background pressure of N 2 . AlN is unusual in that, in spite of a ∼6 eV band gap, it is easily rendered highly absorptive of 248, 308, or 694 nm ...
R. Kelly +6 more
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