Results 261 to 270 of about 71,691 (287)

Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

Advanced Materials, 2018
Tony X Zhou, Rainer Stöhr, Amir Yacoby
exaly  

Molecular dynamics simulation of Si and SiO2 reactive ion etching by fluorine-rich ion species

Surface and Coatings Technology, 2019
Erin Joy Capdos Tinacba, Michiro ISOBE, Kazuhiro Karahashi   +2 more
exaly  

Reactive ion etching of novel materials—GaN and SiC

Vacuum, 2003
Jan Szmidt
exaly  

Selective reactive ion etching of GaAs on AlGaAs using CCl2F2 and He

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1988
Alan C Seabaugh
exaly  

Antireflective nanostructures fabricated by reactive ion etching method on pyramid-structured silicon surface

Applied Surface Science, 2013
Zhihao Yue
exaly  

Smooth and high-rate reactive ion etching of diamond

Diamond and Related Materials, 2002
exaly  

The effect of hydrogen as an additive in reactive ion etching of GaAs for obtaining polished surface

Applied Surface Science, 2006
Fedor Dultsev
exaly  

Reactive Ion Etching (RIE)

2011
openaire   +1 more source

Sheath collision processes controlling the energy and directionality of surface bombardment in O2reactive ion etching

Journal of Applied Physics, 1988
exaly  

Plasma and Reactive Ion Etching

2016
openaire   +1 more source