Results 81 to 90 of about 16,783 (158)

Atomic Layer Etching of Nickel Using N₂/H₂ Plasma Exposure and Hexafluoroacetylacetone. [PDF]

ACS Appl Electron Mater
Ali AM, Krieger G, Soulié JP, Knoops HCM, Kessels WMM, De Gendt S, Kundu S, de Marneffe JF.   +7 more
europepmc   +1 more source

A silicon microneedle array atmospheric pressure plasma ionization source for real-time trace gas chemical analysis. [PDF]

Microsyst Nanoeng
Chew BS, Koch DT, Gibson P, McCartney MM, Borras E, Kenyon NJ, Davis CE.   +6 more
europepmc   +1 more source

Synthesis and advanced applications of MXene nanosheets in energy storage, EMI shielding, and biomedicine: a review. [PDF]

RSC Adv
Ghobashy MM, Baata M, Almoiqli MS, Haque MA, Algethami FK, Siddiq A, Attia MS.   +6 more
europepmc   +1 more source

Wet etching of (-102) β-Ga₂O₃ with tetramethylammonium hydroxide (TMAH). [PDF]

Sci Technol Adv Mater
Oshima T.
europepmc   +1 more source

Suspended Germanium-on-Silicon Photonic Integrated Circuits Operating in the Long-Wave Infrared and Their Use for Ethanol Sensing. [PDF]

ACS Photonics
Lin PS, Hellström PE, Zervos C, Niklaus F, Gylfason KB.   +4 more
europepmc   +1 more source

Atomic Force Microscopy (AFM)-Based Metrology for Advanced Etching in Three-Dimensional Integrated Circuits. [PDF]

Micromachines (Basel)
Chang J, Wang S, Liang S, Feng X, Zhao W.   +4 more
europepmc   +1 more source

Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures. [PDF]

Sci Rep
Kim EK, Hong JW, Lim WS, Kim JY, Kim KL, Park JS, Park YJ, Kim CH, Eoh HJ, Jeong JW, Kim SH, Jeon YW, Kim DW, Yeom GY.   +13 more
europepmc   +1 more source

CMOS-Compatible Fabrication Module for Sub-100 nm TiN and TaN Pillar Electrodes for Carbon Nanotube Test Structures. [PDF]

Nanomaterials (Basel)
Chen G, Fujii T, Yamada T, Hata K.
europepmc   +1 more source

Sputtering yield for metal halide perovskite devices patterning. [PDF]

Sci Technol Adv Mater
Wu E, Tsarev S, Liu X, Proniakova D, Yakunin S, Kovalenko MV, Shorubalko I.   +6 more
europepmc   +1 more source

Photodissociation and electron-collision induced dissociation of C₅H₂F₁₀ using photoelectron-photoion coincidence spectroscopy and quantum chemistry. [PDF]

Sci Rep
Tran NT, Hayashi T, Iwayama H, Ishikawa K.   +3 more
europepmc   +1 more source