Results 61 to 70 of about 16,783 (158)

On Relationships between Gas-Phase Chemistry and Reactive Ion Etching Kinetics for Silicon-Based Thin Films (SiC, SiO₂ and Si_xN_y) in Multi-Component Fluorocarbon Gas Mixtures. [PDF]

Materials (Basel), 2021
Efremov A, Lee BJ, Kwon KH.
europepmc   +1 more source

The Study of Reactive Ion Etching of Heavily Doped Polysilicon Based on HBr/O₂/He Plasmas for Thermopile Devices. [PDF]

Materials (Basel), 2020
Zhou N, Li J, Mao H, Liu H, Liu J, Gao J, Xiang J, Hu Y, Shi M, Ju J, Lei Y, Yang T, Li J, Wang W.   +13 more
europepmc   +1 more source

Reactive ion etching of an ovonic threshold switch (OTS) material using hydrogen-based plasmas for non-volatile phase change memories. [PDF]

RSC Adv, 2020
Kim DS, Kim JE, Gill YJ, Park JW, Jang YJ, Kim YE, Choi H, Kwon O, Yeom GY.   +8 more
europepmc   +1 more source

AI-driven feature recognition of SEM profiles in deep reactive ion etching based on physics-constrained variational autoencoder. [PDF]

Microsyst Nanoeng
Wang F, Yu H, Miao Y, Sun K, Sun Y, Yang H, Li X.   +6 more
europepmc   +1 more source

The Influence of Reactive Ion Etching Chemistry on the Initial Resistance and Cycling Stability of Line-Type (Bridge) Phase-Change Memory Devices. [PDF]

Materials (Basel)
Espiari A, Padberg H, Kiehn A, Schnieders K, Zhang J, Mussler G, Wiefels S, Jalil AR, Grützmacher D.   +8 more
europepmc   +1 more source

Improving Adhesion of UHMWPE with Epoxy Matrix by Reactive Ion Etching of UHMWPE Using Ar-O₂ Plasma and the Effects of Plasma on Adhesion at the Micro- and Macroscale. [PDF]

ACS Appl Mater Interfaces
Sikander U, Hazzard MK, Hamerton I, Wisnom MR.   +3 more
europepmc   +1 more source

Dry Etching Characteristics of InGaZnO Thin Films Under Inductively Coupled Plasma-Reactive-Ion Etching with Hydrochloride and Argon Gas Mixture. [PDF]

Materials (Basel)
Oh C, Ju MW, Jeong H, Song JH, Kim BS, Lee DG, Cho C.   +6 more
europepmc   +1 more source

Reactive ion etching for fabrication of biofunctional titanium nanostructures. [PDF]

Sci Rep, 2019
Ganjian M, Modaresifar K, Zhang H, Hagedoorn PL, Fratila-Apachitei LE, Zadpoor AA.   +5 more
europepmc   +1 more source

On reactive Ion Etching of Parylene-C with Simple Photoresist Mask for Fabrication of High Porosity Membranes to Capture Circulating and Exfoliated Tumor Cells. [PDF]

Micromachines (Basel)
Rabadi I, Carpentieri D, Wang J, Zenhausern F, Gu J.   +4 more
europepmc   +1 more source

Enhancing Si₃N₄ Selectivity over SiO₂ in Low-RF Power NF₃-O₂ Reactive Ion Etching: The Effect of NO Surface Reaction. [PDF]

Sensors (Basel)
Tung NH, Lee H, Dinh DK, Kim DW, Lee JY, Eom GW, Kim HU, Kang WS.   +7 more
europepmc   +1 more source