Results 71 to 80 of about 16,783 (158)

Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y₂O₃-Y₄Al₂O₉ composite under CF₄/Ar/O₂ mixed gas conditions. [PDF]

Sci Rep
Ma HJ, Kim S, Kim HN, Kim MJ, Ko JW, Lee JW, Kim JH, Lee HC, Park YJ.   +8 more
europepmc   +1 more source

Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics. [PDF]

Microsyst Nanoeng, 2019
Li Y, Zhang H, Yang R, Laffitte Y, Schmill U, Hu W, Kaddoura M, Blondeel EJM, Cui B.   +8 more
europepmc   +1 more source

Precision micro-mechanical components in single crystal diamond by deep reactive ion etching. [PDF]

Microsyst Nanoeng, 2018
Toros A, Kiss M, Graziosi T, Sattari H, Gallo P, Quack N.   +5 more
europepmc   +1 more source

Time multiplexed deep reactive ion etching of germanium and silicon-A comparison of mechanisms and application to x-ray optics. [PDF]

J Vac Sci Technol B Nanotechnol Microelectron, 2018
Genova VJ, Agyeman-Budu DN, Woll AR.
europepmc   +1 more source

Ultraviolet Laser Damage Dependence on Contamination Concentration in Fused Silica Optics during Reactive Ion Etching Process. [PDF]

Materials (Basel), 2018
Sun L, Shao T, Shi Z, Huang J, Ye X, Jiang X, Wu W, Yang L, Zheng W.   +8 more
europepmc   +1 more source

Wafer-Scale Hierarchical Nanopillar Arrays Based on Au Masks and Reactive Ion Etching for Effective 3D SERS Substrate. [PDF]

Materials (Basel), 2018
Men D, Wu Y, Wang C, Xiang J, Yang G, Wan C, Zhang H.   +6 more
europepmc   +1 more source

Classification of etching mechanism in reactive ion beam etching

Classification of etching mechanism in reactive ion beam etching
identifier:oai:t2r2.star.titech.ac.jp ...
openaire  

Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching. [PDF]

Sci Rep, 2018
Wu Q, Liu B, Zhu Z, Gu M, Chen H, Xue C, Zhao J, Wu Y, Tai R, Ouyang X.   +9 more
europepmc   +1 more source

Classification of etching mechanism in reactive ion beam etch

Classification of etching mechanism in reactive ion beam etch
identifier:oai:t2r2.star.titech.ac.jp ...
openaire  

One-Step Radical-Intensified Selective Etching (RISE) Strategy for High-Yield Synthesis of Monolayer MXene with Tailored Nanoholes. [PDF]

Angew Chem Int Ed Engl
Liu C, Zhang H, Sikdar A, Pang K, Ma G, Xi K, Ding S, Yuan J, Zhang M.   +8 more
europepmc   +1 more source