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2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), 2004
In this paper, a unique concept for RF MEMS waveguide switches is introduced. The proposed structure employs a ridge waveguide integrated with MEMS actuators. The switch combines the advantages of MEMS technology with the high power handling capability of waveguide technology. It also promises to be useful in high frequency applications 100-200 GHz. In
M. Daneshmand, R.R. Mansour, N. Sarkar
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In this paper, a unique concept for RF MEMS waveguide switches is introduced. The proposed structure employs a ridge waveguide integrated with MEMS actuators. The switch combines the advantages of MEMS technology with the high power handling capability of waveguide technology. It also promises to be useful in high frequency applications 100-200 GHz. In
M. Daneshmand, R.R. Mansour, N. Sarkar
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MEMS TECHNOLOGY FOR RF SWITCHES
Sensors and Microsystems, 2004In the last years there was an increasing interest in micromachined RF switches, mainly in the communication and space industries. This article describes a fabrication process used for the development of electrostatically actuated MEMS RF switches operating in the 2 - 40 GHz range.
F Giacomozzi +4 more
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IEEE Microwave Magazine, 2009
RF MEMS technology was initially developed as a replacement for GaAs HEMT switches and p-i-n diodes for low-loss switching networks and X-band to mm-wave phase shifters. However, we have found that its very low loss properties (high device Q), its simple microwave circuit model and zero power consumption, its high power (voltage/current) handling ...
Gabriel Rebeiz +6 more
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RF MEMS technology was initially developed as a replacement for GaAs HEMT switches and p-i-n diodes for low-loss switching networks and X-band to mm-wave phase shifters. However, we have found that its very low loss properties (high device Q), its simple microwave circuit model and zero power consumption, its high power (voltage/current) handling ...
Gabriel Rebeiz +6 more
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2007 European Microwave Conference, 2007
This document summarizes the results of the RF MEMS roadmapping project ARRRO (Applied Research Roadmap for Micro and Nano Systems). This project has been financed by the European Commission within the 6th Framework Programme. The paper will present some excerpts of the project regarding the 1) RF MEMS product roadmap with the example of RF MEMS ...
Jeremie Bouchaud +4 more
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This document summarizes the results of the RF MEMS roadmapping project ARRRO (Applied Research Roadmap for Micro and Nano Systems). This project has been financed by the European Commission within the 6th Framework Programme. The paper will present some excerpts of the project regarding the 1) RF MEMS product roadmap with the example of RF MEMS ...
Jeremie Bouchaud +4 more
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RF MEMS FOR SPACE APPLICATIONS
2005 International Conference on MEMS,NANO and Smart Systems, 2006The mass, volume and dc power consumption of payload electronic equipment is a significant contributor to the overall cost of space systems. The radiofrequency (RF) microelectromechanical system (MEMS) technology offers the potential of large reduction in mass and volume of electronic equipment, by replacing the waveguide and coaxial switch matrices ...
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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2004
Device reliability is a key factor in the ultimate insertion of RF MEMS devices into operational systems. In particular, cycle lifetimes of contacting devices such as RF switches can be technically challenging due to the requirement of good contact electrical performance under operational stresses.
J. DeNatale, R. Mihailovich
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Device reliability is a key factor in the ultimate insertion of RF MEMS devices into operational systems. In particular, cycle lifetimes of contacting devices such as RF switches can be technically challenging due to the requirement of good contact electrical performance under operational stresses.
J. DeNatale, R. Mihailovich
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RF-MEMS for Wireless Communications
IEEE Communications Magazine, 2008This article presents an introduction and overview of MEMS technology with a focus on RF applications of MEMS in the design of cellular handsets. A novel, integrated, high-Q tunable digital capacitor is discussed to demonstrate how RF-MEMS technology can be utilized to make high frequency components whose RF characteristics can be adjusted during ...
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RF MEMS in wireless architectures
Proceedings of the 42nd annual conference on Design automation - DAC '05, 2005Micromechanical (or "/spl mu/mechanical") communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers.
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Modeling of RF- MEMS BAW Resonator
2010 23rd International Conference on VLSI Design, 2010Due to the demand of smaller and more portable devices the applications of MEMS resonators are rapidly increasing. Solidly Mounted Resonators (SMR) based on Bulk Acoustic Wave (BAW) technology follow MEMS principles to build high performance microwave filters for RF communication. In this paper we will provide the architecture of SMRs by discussing the
Ambarish Roy +2 more
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IEEE Microwave Magazine, 2009
This article gives an overview of applications of radio frequency (RF) microelectromechanical system (MEMS) technology in radio detection and ranging (radar). RF MEMS components for radar include attenuators, limiters, (true-time-delay) phase shifters, transmit/receive (T/R) switches and tunable matching networks.
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This article gives an overview of applications of radio frequency (RF) microelectromechanical system (MEMS) technology in radio detection and ranging (radar). RF MEMS components for radar include attenuators, limiters, (true-time-delay) phase shifters, transmit/receive (T/R) switches and tunable matching networks.
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