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MEMS technology for RF passive components

Proceedings of the 4th International Symposium on Applied Sciences in Biomedical and Communication Technologies, 2011
In this work a wide overview on the exploitation of MEMS technology (MicroElectroMechanical-Systems) for Radio Frequency (i.e. RF-MEMS) and telecommunication systems is provided. In the last 10-15 years MEMS technology proved to be a valuable solution for the realization of passive components for RF circuits, like variable capacitors (i.e.
Jacopo Iannacci   +2 more
openaire   +1 more source

An above IC MEMS RF switch

IEEE Journal of Solid-State Circuits, 2003
Addressing reconfiguration of radio frequency (RF) systems might require high performance integrated RF switching capabilities. In this regard, a particular design experience of an integrated circuit (IC) monolithically integrated microelectromechanical systems (MEMS) ohmic switch is reported here. Applications at 2 GHz have been targeted.
Daniel Saias   +6 more
openaire   +1 more source

RF MEMS and Their Applications

2002
Preface. Microelectromechanical Systems (MEMS) and Radio Frequency MEMS. MEMS Materials and Fabrication Techniques. RF MEMS Switches and Micro Relays. MEMS Inductors and Capacitors. Micromachined RF Filters. Micromachined Phase Shifters. Micromachined Transmission Lines and Components. Micromachined Antennae.
Vijay K. Varadan, K.J. Vinoy, K.A. Jose
openaire   +1 more source

MEMS for RF Applications

IETE Technical Review, 2004
Micro-Electro-Mechanical-Systems (MEMS) technology promises revolution in the various application domains in the 21st century. RF communication systems are expected to be benefited through MEMS technology. The desire for the mobile gadgets to do the computing, communication and customer specific functions dictates that these gadgets should encompass a ...
openaire   +1 more source

Advanced RF MEMS

2010
An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated ...
openaire   +1 more source

RF MEMS

2016
T. Singh, N. Kingsley, J. Papapolymerou
openaire   +2 more sources

Review of Recent Development of MEMS Speakers

Micromachines, 2021
Haoran Wang, Yao Lu, Huikai Xie
exaly  

RF MEMS

2008
Nickolas Kingsley, John Papapolymerou
openaire   +1 more source

Displays, Sensors, and MEMS - RF MEMS

2007 IEEE International Electron Devices Meeting, 2007
Werner Weber, Thomas A. Friedman
openaire   +1 more source

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Micromachines, 2020
Jianxiong Zhu   +2 more
exaly  

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