Results 171 to 180 of about 3,258 (190)

CMOS MEMS Fabrication Technologies and Devices

Micromachines, 2016
Hongwei Qu
exaly  

Internet of things (IoT); internet of everything (IoE); tactile internet; 5G – A (not so evanescent) unifying vision empowered by EH-MEMS (energy harvesting MEMS) and RF-MEMS (radio frequency MEMS)

Sensors and Actuators A: Physical, 2018
Jacopo Iannacci
exaly  

RF-MEMS/NEMS

2012
Jae-Sung Kwon, Raviraj Thakur, Steven T. Wereley, J. David Schall, Paul T. Mikulski, Kathleen E. Ryan, Pamela L. Keating, M. Todd Knippenberg, Judith A. Harrison, Tuncay Alan, Gilgueng Hwang, Stéphane Régnier, Michèle Riesen, Nuria Vergara-Irigaray, Sergej Fatikow, Daniel Jasper, Christian Dahmen, Florian Krohs, Volkmar Eichhorn, Michael Weigel-Jech, Bharat Bhushan, Michael Nosonovsky   +21 more
openaire   +1 more source

A Review of the Capacitive MEMS for Seismology

Sensors, 2019
Salvatore Scudero, Giovanni Vitale, Scudero Salvatore   +2 more
exaly  

Optoelectrothermic Control of Highly Integrated Polymer‐Based MEMS Applied in an Artificial Skin

Advanced Materials, 2009
Andreas Richter, Georgi Paschew
exaly  

Integration design of a MEMS based fuze

Sensors and Actuators A: Physical, 2017
Tengjiang Hu, Yulong Zhao
exaly  

RF-MEMS/NEMS

2016
openaire   +2 more sources

Trends and frontiers of MEMS

Sensors and Actuators A: Physical, 2007
Wen H Ko
exaly  

A CAD tool for RF MEMS devices

2008 Asia and South Pacific Design Automation Conference, 2008
Rajesh Pande, Rajendra M. Patrikar
openaire   +1 more source

Nanotwinned metal MEMS films with unprecedented strength and stability

Science Advances, 2017
Gi-Dong Sim, Jessica A Krogstad, Kolan Madhav Reddy   +2 more
exaly