Results 181 to 190 of about 3,258 (190)
Some of the next articles are maybe not open access.
Non-silicon MEMS platforms for gas sensors
Sensors and Actuators B: Chemical, 2016Alexey Vasiliev +2 more
exaly
Electrostatic and RF-Properties of MEMS Structures
2010Tittonen Ilkka, Koskenvuori Mika
openaire +1 more source
Summary of Research Status and Application of MEMS Accelerometers
Journal of Computer and Communications, 2018exaly
Advances of materials science in MEMS applications: A review
Results in EngineeringNayem Hossain +2 more
exaly

