Results 181 to 190 of about 3,258 (190)
Some of the next articles are maybe not open access.

Non-silicon MEMS platforms for gas sensors

Sensors and Actuators B: Chemical, 2016
Alexey Vasiliev   +2 more
exaly  

RF MEMS Switch

2017
Li-Feng Wang, Qing-An Huang, Lei Han
openaire   +1 more source

RF MEMS Switches

2012
Jae-Sung Kwon   +21 more
openaire   +1 more source

Electrostatic and RF-Properties of MEMS Structures

2010
Tittonen Ilkka, Koskenvuori Mika
openaire   +1 more source

Reliability of RF MEMS

2013
I. De Wolf   +5 more
openaire   +1 more source

Summary of Research Status and Application of MEMS Accelerometers

Journal of Computer and Communications, 2018
exaly  

Advances of materials science in MEMS applications: A review

Results in Engineering
Nayem Hossain   +2 more
exaly  

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