Results 161 to 170 of about 3,258 (190)
Some of the next articles are maybe not open access.

RF MEMS Technology

2022
Gustavo P. Rehder   +6 more
openaire   +1 more source

MEMS Mirrors for LiDAR: A Review

Micromachines, 2020
Dingkang Wang, Huikai Xie, Xie Huikai
exaly  

A review of vibration-based MEMS piezoelectric energy harvesters

Energy Conversion and Management, 2011
Salem Saadon, Othman Sidek
exaly  

MEMS Mechanical Sensors

Sensor Review, 2004
Steve Beeby
exaly  

From MEMS to NEMS with carbon

Biosensors and Bioelectronics, 2005
Chunlei Wang, Marc Madou
exaly  

Friction and wear properties in MEMS

Sensors and Actuators A: Physical, 2002
Weiyuan Wang, Haifei Bao, Bin Xiong
exaly  

CMOS–MEMS resonators: From devices to applications

Microelectronic Engineering, 2015
A Uranga, J Verd, N Barniol
exaly  

MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Sensors and Actuators A: Physical, 2014
Erkang Wang   +2 more
exaly  

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