Results 191 to 200 of about 4,206 (226)

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2012
Composition spread alloy films (CSAFs) are materials libraries used for high throughput investigations of multicomponent materials such as alloys, AxByC1−x−y. CSAFs are prepared such that the alloy film has a lateral spatial gradient in its local composition; thus, they include a set of alloy samples with a distribution of compositions that spans a ...
Benoit Fleutot, James B. Miller, Andrew J. Gellman   +2 more
openaire   +1 more source

Fabrication of TiN thin film by shadow-masked pulsed laser deposition

Thin Solid Films, 2001
A shadow-masked pulsed laser deposition (SPLD) technique has been used to fabricate TiN thin film on a silicon substrate. By interposing a chosen mask of the appropriate size and location between the laser-induced plasma plume and the substrate, it was possible to vary the quality and smoothness of the resultant film.
Chen, C., Ong, P.P., Wang, H.
openaire   +1 more source

Stoichiometry and thickness variation of YBa2Cu3O7−x in pulsed laser deposition with a shadow mask

Applied Physics Letters, 1997
The deposition of particulate species, typically seen in pulsed laser deposition can be eliminated by the deployment of a line-of-sight shadow technique. Since the technique uses the discrimination between ballistic and diffusive species, it is important to understand the lateral stoichiometry and thickness dependence under various deposition ...
Z. Trajanovic, S. Choopun, R. P. Sharma, T. Venkatesan   +3 more
openaire   +1 more source

PECVD Shadow Mask Deposition of Amorphous Silicon– a Shortcut to Local Passivating Contacts

2020
We develop and investigate shadow masks for the local PECVD deposition of amorphous Si (a-Si) fingers to be applied as local poly-crystalline Si (poly-Si) passivating contacts in the industrial fabrication of novel solar cell concepts such as TOPCon, PERC+POLO and POLO-IBC.
Stöhr, M., Beier, B., Aprojanz, J., Vogt, A., Ambrosius, N., Brendel, R., Dullweber, T.   +6 more
openaire   +1 more source

Patterning and hardening of gold black infrared absorber by shadow mask deposition with ethyl cyanoacrylate

SPIE Proceedings, 2013
Patterning of gold-black infrared absorbing films by stencil lithography and hardening by polymer infusion is reported. Gold black nano-structured films are deposited through a thin metal shadow mask in a thermal evaporator in ~400 mTorr pressure of inert gas, followed by ethyl cyanoacrylate fuming through the same mask to produce rugged IR absorptive ...
Deep Panjwani, Nima Nader-Esfahani, Doug Maukonen, Imen Rezadad, Javaneh Boroumand, Evan Smith, Janardan Nath, R. E. Peale   +7 more
openaire   +2 more sources

Thin silicon shadow masks for organic light-emitting diodes (OLED) deposition processes

SPIE Proceedings, 2006
In this paper, we report thin silicon shadow masks used for vacuum thermal evaporation (VTE) for manufacturing compact-size OLED (organic light emitting diodes) displays. Currently, the OLED displays attract many research attentions because of novel organic materials for emitting the light at relative low cost.
Ching-Chang Tseng, Chen-Wei Chiu, Kai-Xiang Zhung, Jiun-Haw Lee, Guo-Dung John Su   +4 more
openaire   +1 more source

A close proximity self-aligned shadow mask for sputter deposition onto a membrane or cavity

Journal of Micromechanics and Microengineering, 2008
In this paper we report on the fabrication of a close proximity shadow mask designed for sputtering into cavities or onto the back surface of freestanding silicon nitride (SiNx) membranes. Sputtering into a well-defined area on a fragile surface is difficult since sputter deposition through a shadow mask separated from the deposition surface typically ...
Ravi K Kummamuru, Liang Hu, Lawrence Cook, Mikhail Y Efremov, Eric A Olson, Leslie H Allen   +5 more
openaire   +1 more source

Integrated Shadow Mask for Full Angle Deposition in Fabrication of Passive Matrix OLED Displays

2005 7th Electronic Packaging Technology Conference, 2006
This paper reports a novel structural design of an integrated shadow mask and its fabrication process that can be used for fabrication of passive matrix OLED displays. The integrated shadow mask is composed of two components: laterally spaced and electrically insulating pillars with retrograded side walls and humps disposed nearby the retrograde side ...
Z.H. Huang, G.J. Qi, X.T. Zeng
openaire   +1 more source

Precise, scalable shadow mask patterning of vacuum-deposited organic light emitting devices

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1999
We demonstrate a scheme to pattern vacuum-deposited, small molecular weight organic light emitting diodes (OLEDs). Both the organic thin films and the metallic electrodes are patterned by shifting the position of a single shadow mask which accompanies the substrate throughout the deposition process.
P. F. Tian, V. Bulovic, P. E. Burrows, G. Gu, S. R. Forrest, T. X. Zhou   +5 more
openaire   +1 more source

Site-controlled droplet epitaxy of GaAs quantum dots by deposition through shadow masks

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2018
Droplet epitaxy is a versatile method for fabricating nanostructures, but the standard process relies on spatially random droplet formation resulting in poor control of the position of the final nanostructure. The authors demonstrate site-controlled droplet formation utilizing local Ga deposition combined with self-assembled droplet formation.
Viktoryia Zolatanosha, Dirk Reuter
openaire   +1 more source